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Masaki Ohashi
at Shin-Etsu Chemical Co Ltd
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Publications (2)
Proceedings Article | 20 March 2012 Paper
Focus improvement with NIR absorbing underlayer attenuating substructure reflectivity
Wu-Song Huang, Dario Goldfarb, Wai-kin Li, Martin Glodde, Kazumi Noda, Seiichiro Tachibana, Masaki Ohashi, Dah-Chung Owe-Yang, Takeshi Kinsho
Proceedings Volume 8325, 83251A (2012) https://doi.org/10.1117/12.916240
KEYWORDS: Near infrared, Sensors, Semiconducting wafers, Reflectivity, Back end of line, Metals, Optical sensors, Polymers, Coating, Absorption
Proceedings Article | 26 March 2010 Paper
Inactivation technology for pitch doubling lithography
Jun Hatakeyama, Masaki Ohashi, Youichi Ohsawa, Kazuhiro Katayama, Yoshio Kawai
Proceedings Volume 7639, 76392U (2010) https://doi.org/10.1117/12.849211
KEYWORDS: Double patterning technology, Optical lithography, Second-harmonic generation, Lithography, Photoresist processing, Thin film coatings, Polarization, Photomasks, Manufacturing, Etching
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