Dr. Michael Canonica Profile

Dr. Michael Canonica

PhD Student at Ecole Polytechnique Fédérale de Lausanne

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Publications (10)

Proceedings Article | 5 September 2019 Open Access

Fully programmable micro diffraction grating for VIS and near-IR spectroscopic applications

R. Lockhart, B. Timotijevic, M. Canonica

Proceedings Volume 10565, 105656C (2019) https://doi.org/10.1117/12.2552745

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Proceedings Article | 20 November 2017 Open Access

Large micromirror array for multi-object spectroscopy in space

Michael Canonica, Frédéric Zamkotsian, Patrick Lanzoni, Wilfried Noell

Proceedings Volume 10564, 105642O (2017) https://doi.org/10.1117/12.2309080

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Proceedings Article | 7 March 2014 Paper

Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization

Frédéric Zamkotsian, Michael Canonica, Patrick Lanzoni, Wilfried Noell, Sebastien Lani

Proceedings Volume 8977, 89770Q (2014) https://doi.org/10.1117/12.2041692

KEYWORDS: Micromirrors, Mirrors, Cryogenics, Semiconducting wafers, Space telescopes, Molybdenum, Electrodes, Wafer bonding, Gold, Astronomical imaging

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Proceedings Article | 13 March 2013 Paper

Development of a fully programmable MEMS diffraction grating

F. Zamkotsian, B. Timotijevic, R. Lockhart, R. Stanley, P. Lanzoni, M. Luetzelschwab, M. Canonica, W. Noel, M. Tormen

Proceedings Volume 8616, 86160K (2013) https://doi.org/10.1117/12.2007290

KEYWORDS: Micromirrors, Diffraction gratings, Electrodes, Microelectromechanical systems, Semiconducting wafers, Mirrors, Cameras, Diffraction, Silicon, Microfabrication

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Proceedings Article | 13 September 2012 Paper

Large micromirror array for generating programmable slit masks for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 8450, 84501E (2012) https://doi.org/10.1117/12.927144

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Semiconducting wafers, Molybdenum, Gold, Space telescopes, Astronomical imaging, Wafer bonding

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Proceedings Article | 16 February 2012 Paper

Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 8252, 82520B (2012) https://doi.org/10.1117/12.910094

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Semiconducting wafers, Gold, Reflectivity, Astronomical imaging, Coating, Wafer bonding

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Proceedings Article | 14 February 2011 Paper

MEMS-based programmable reflective slit mask for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7930, 79300N (2011) https://doi.org/10.1117/12.874438

KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Photomasks, Astronomical imaging, Wafer bonding, Deep reactive ion etching, Gold, Oxides

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Proceedings Article | 20 July 2010 Paper

Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico De Rooij

Proceedings Volume 7739, 77394Q (2010) https://doi.org/10.1117/12.858258

KEYWORDS: Micromirrors, Electrodes, Mirrors, Molybdenum, Cryogenics, Astronomical imaging, Spectroscopes, Space telescopes, Silicon, Infrared telescopes

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Proceedings Article | 17 February 2010 Paper

Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proceedings Volume 7594, 75940P (2010) https://doi.org/10.1117/12.841547

KEYWORDS: Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Molybdenum, Microfabrication, Cryogenics, Astronomical imaging, Space telescopes, Silicon

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Proceedings Article | 24 February 2009 Paper

Large micromirror array for multi-object spectroscopy in a cryogenic environment

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Pierre-Andre Clerc, Wilfried Noell, Nico de Rooij

Proceedings Volume 7208, 72080K (2009) https://doi.org/10.1117/12.811117

KEYWORDS: Micromirrors, Mirrors, Electrodes, Cryogenics, Silicon, Astronomical imaging, Space telescopes, Telescopes, Molybdenum, Optical alignment

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Showing 5 of 10 publications

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