Dr. Michael J. Shaw Profile

Dr. Michael J. Shaw

Member Technical Staff at Sandia National Labs

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Author

Publications (8)

Proceedings Article | 18 March 2016 Paper

VCSELs for interferometric readout of MEMS sensors

Darwin Serkland, Kent Geib, Gregory Peake, Gordon Keeler, Michael Shaw, Michael Baker, Murat Okandan

Proceedings Volume 9766, 976606 (2016) https://doi.org/10.1117/12.2214522

KEYWORDS: Vertical cavity surface emitting lasers, Sensors, Microelectromechanical systems, Interferometry, Interferometers, Integrated optics, Microopto electromechanical systems, Gyroscopes, Capacitance, Motion measurement, Mirrors, Diffraction gratings, Michelson interferometers, Diffraction

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Proceedings Article | 29 April 2010 Paper

Understanding Li-ion battery processes at the atomic- to nano-scale

J. Sullivan, J. Huang, M. Shaw, A. Subramanian, N. Hudak, Y. Zhan, J. Lou

Proceedings Volume 7683, 76830B (2010) https://doi.org/10.1117/12.849530

KEYWORDS: Transmission electron microscopy, Electrodes, Lithium, Liquids, Silicon, Dielectrophoresis, Nanolithography, Particles, Microelectromechanical systems, Nanowires

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Proceedings Article | 16 February 2010 Paper

A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics

J. Wright, I. Brener, K. Westlake, D. Branch, M. Shaw, G. Vawter

Proceedings Volume 7605, 76050C (2010) https://doi.org/10.1117/12.842283

KEYWORDS: Sensors, Waveguides, Resonators, Microrings, Refractive index, Microfluidics, Etching, Servomechanisms, Multiplexing, Liquids

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Proceedings Article | 19 February 2009 Paper

Microphotonic thermal detectors and imagers

Michael Watts, Michael Shaw, Peter Rakich, Anthony Lentine, Gregory Nielson, Jeremy Wright, William Zortman, Frederick McCormick

Proceedings Volume 7194, 71940T (2009) https://doi.org/10.1117/12.821117

KEYWORDS: Sensors, Silicon, Resonators, Microrings, Waveguides, Thermography, Oxides, Thermal optics, Phonons, Microbolometers

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Proceedings Article | 6 February 2008 Paper

Fabrication techniques for creating a thermally isolated TM-FPA (thermal microphotonic focal plane array)

Michael Shaw, Michael Watts, Gregory Nielson

Proceedings Volume 6883, 688308 (2008) https://doi.org/10.1117/12.764632

KEYWORDS: Silicon, Microrings, Oxides, Waveguides, Resonators, Sensors, Etching, Computer aided design, Silica, Photomasks

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Proceedings Article | 31 March 2005 Paper

High-Q microring resonator for biochemical sensors

Junpeng Guo, Michael Shaw, G. Vawter, G. Hadley, Peter Esherick, Charles Sullivan

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.589467

KEYWORDS: Microrings, Resonators, Waveguides, Silicon, Cladding, Liquids, Sensors, Semiconducting wafers, Mach-Zehnder interferometers, Silica

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Proceedings Article | 22 January 2005 Paper

Fabrication techniques for low-loss silicon nitride waveguides

Michael Shaw, Junpeng Guo, Gregory Vawter, Scott Habermehl, Charles Sullivan

Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.588828

KEYWORDS: Waveguides, Silicon, Cladding, Photonic integrated circuits, Semiconducting wafers, Oxides, Fabrication, Silica, Chemical mechanical planarization, Oxidation

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Proceedings Article | 14 June 2004 Paper

Characterization of Si3N4/SiO2 planar lightwave circuits and ring resonators

Junpeng Guo, G. Allen Vawter, Michael Shaw, G. Ronald Hadley, Peter Esherick, Anisha Jain, Charles Alford, Charles Sullivan

Proceedings Volume 5350, (2004) https://doi.org/10.1117/12.529641

KEYWORDS: Waveguides, Silicon, Silica, Photonic integrated circuits, Resonators, Refractive index, Cladding, Semiconducting wafers, Polarizers, Polarization

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Showing 5 of 8 publications

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