Dr. Michel Despont Profile

Dr. Michel Despont

at CSEM SA

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Author

Publications (6)

Proceedings Article | 18 June 2024 Presentation + Paper

Thin-film lithium niobate PICs: advancements and potential applications in telecom and beyond

H. Sattari, I. Prieto, H. Zarebidaki, J. Leo, G. Choong, F. Arefi, M. Orvietani, A. Della Torre, A. Mettraux, F. Dubois, D. Herle, Y. Petremand, M. Palmieri, O. Dubochet, M. Despont

Proceedings Volume 13012, 130120H (2024) https://doi.org/10.1117/12.3026042

KEYWORDS: Photonic integrated circuits, Manufacturing, Thin films, Telecommunications, Lithium niobate, Waveguides, Standards development, Quantum processes, Design, Photonic quantum computing

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Proceedings Article | 4 March 2019 Paper

Large 1D and 2D micro-mirror arrays for universe and Earth observation

Frederic Zamkotsian, Yves Petremand, Patrick Lanzoni, Sebastien Lani, Rudy Barette, Branislav Timotijevic, Michel Despont

Proceedings Volume 10931, 1093103 (2019) https://doi.org/10.1117/12.2513287

KEYWORDS: Micromirrors, Semiconducting wafers, Mirrors, Clouds, Microopto electromechanical systems, Wafer bonding, Electrodes, Spectrographs, Spectroscopy

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Proceedings Article | 22 February 2018 Presentation + Paper

Novel micro-fabricated Fabry-Perot filters in infrared

Branislav Timotijevic, Andrea Dunbar, Arno Hoogerwerf, Nemanja Niketic, Ross Stanley, Michel Despont

Proceedings Volume 10545, 105450I (2018) https://doi.org/10.1117/12.2285363

KEYWORDS: Optical filters, Silicon, Metals, Infrared radiation, Semiconducting wafers, Fabry–Perot interferometers, Microfabrication, Gold, Mirrors

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Proceedings Article | 27 February 2015 Paper

2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback

S. Lani, Dara Bayat, M. Despont

Proceedings Volume 9375, 93750C (2015) https://doi.org/10.1117/12.2078618

KEYWORDS: Mirrors, Sensors, Piezoresistive sensors, Scanners, Microelectromechanical systems, Position sensors, Resistance, Micromirrors, Silicon, Wheatstone bridges

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Proceedings Article | 1 October 2013 Paper

Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D

Felix Holzner, Philip Paul, Michel Despont, Lin Lee Cheong, James Hedrick, Urs Dürig, Armin Knoll

Proceedings Volume 8886, 888605 (2013) https://doi.org/10.1117/12.2032318

KEYWORDS: Electron beam lithography, Optical lithography, Nanolithography, Silicon, Polymers, Scanning probe lithography, Reactive ion etching, Photomasks, Lithography, Scanning electron microscopy

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Proceedings Article | 3 April 2010 Paper

Direct write 3-dimensional nanopatterning using probes

David Pires, Armin Knoll, Urs Duerig, Ute Drechsler, Michel Despont, Heiko Wolf, James Hedrick, Ekmini de Silva

Proceedings Volume 7637, 76371E (2010) https://doi.org/10.1117/12.847290

KEYWORDS: Optical lithography, Glasses, Silicon, Reactive ion etching, Lithography, Etching, Electron beam lithography, Molecules, Nanostructures, Sensors

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Showing 5 of 6 publications

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