The direct side-pumping of Nd:YAG rods with laser diodes has been shown to be a cost effective scheme for scaling to
simultaneous high average and high peak power operation. Careful control of the parameters that govern the performance
of a multi-spatial mode MOPA system has led to the demonstration of reliable Q-switched average powers of up to
1600 W and peak powers in excess of 18 MW at the 1064 nm fundamental wavelength. The techniques used to refine the
properties of an infrared stable resonator in order to optimise intra-cavity second harmonic generation are discussed.
Average powers of up to 290 W and peak powers of up to 0.45 MW at 532 nm have been demonstrated from a single
cavity. By polarisation multiplexing the outputs of two cavities emitting at 532 nm, we have achieved single-beam
average and peak powers of up to 580 W and 0.9 MW respectively and gained flexible control of pulse duration and
temporal shape.
Ian Mercer, Andrew Comley, Sebastian Davis-Ansted, Michael Egan, Samir Ellwi, Paul Harrison, Ian Henderson, Matt Kelly, Michael Mason, Mark Middleton, Ian Morris, Duncan Parsons-Karavassilis, Terrance Nowell, Peter Raven, Adrain Russel, David Klug, Alan Taylor
Electrical to EUV conversion efficiency is a key parameter for systems scaled to EUV emission in the 100W regime. Improvement in efficiency of conversion from laser radiation at the EUV source, reduces the required laser power and as such can lend itself to reduced heat load and debris emission. Also, improvement in the electrical to laser conversion efficiency results in a direct reduction in cost of ownership. Laser solutions optimised for efficient conversion to high M2 CW laser radiation are not optimised in design for efficient short-pulsed operation; the mode of operation required for EUV generation. Aspects of both EUV source and laser design are discussed, with a view to optimising conversion efficiency for scalable EUV solutions.
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