Mr. Min-Woo Kim Profile

Min-Woo Kim

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Publications (1)

Proceedings Article | 21 November 2023 Poster + Paper

Thermal deformation variations with field positions on the wafer and resist types (CAR and MOR)

Hee-Chang Ko, Min-Woo Kim, Ji-Won Kang, Hye-Keun Oh

Proceedings Volume 12750, 1275016 (2023) https://doi.org/10.1117/12.2686285

KEYWORDS: Thermal deformation, Semiconducting wafers, Extreme ultraviolet lithography, Materials properties, Scanners, Optical lithography, Finite element methods, Extreme ultraviolet, Convection, Overlay metrology

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