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Ming-Zheng Li

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Proceedings Article | 3 September 2019 Paper

Tunable optical properties of uniform and nanostructured TiN thin films

Yi-Jun Jen, Meng-Jie Lin, Ming-Zheng Li, Ming-Yang Cong

Proceedings Volume 11089, 110892S (2019) https://doi.org/10.1117/12.2535680

KEYWORDS: Tin, Thin films, Plasmonics, Sputter deposition

Read Abstract +

In this work, TiN uniform thin films and nanostructured thin films were fabricated in a magnetron sputtering system. Two sets of TiN thin films with and without substrate bias were deposited at a nitrogen flow rate varied from 1.2 sccm to 2.0 sccm. The permittivity spectra of TiN films were measured and compared between different deposition conditions. A glancing angle-deposited TiN nanorod array was deposited with substrate bias. The polarization dependent extinction versus wavelength and angle of incidence was measured to discuss the associated transverse and longitudinal plasmonic modes.

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