Dr. Mingzhen Lu Profile

Dr. Mingzhen Lu

at National Institute of Metrology

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Author

Publications (9)

Proceedings Article | 10 October 2013 Paper

Critical dimensional linewidth calibration using UV microscope and laser interferometry

Qi Li, Si-tian Gao, Wei Li, Ming-zhen Lu, Ming-kai Zhang

Proceedings Volume 8916, 891635 (2013) https://doi.org/10.1117/12.2035850

KEYWORDS: Ultraviolet radiation, Calibration, Objectives, Microscopes, Metrology, Interferometers, Actuators, Ferroelectric materials, Wavelets, Lithography

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Proceedings Article | 10 October 2013 Paper

Dual AFM probes alignment based on vision guidance

Hua-kun Zhang, Si-tian Gao, Ming-zhen Lu, Long-long Wang

Proceedings Volume 8916, 891627 (2013) https://doi.org/10.1117/12.2035775

KEYWORDS: Atomic force microscopy, Edge detection, Charge-coupled devices, Control systems, Calibration, 3D metrology, Quartz, Detection and tracking algorithms, Atomic force microscope, Optical resolution

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Proceedings Article | 10 October 2013 Paper

Simulation and signal analysis of Akiyama probe applied to atomic force microscope

Longlong Wang, Mingzhen Lu, Tong Guo, Sitian Gao, Huakun Zhang

Proceedings Volume 8916, 89160W (2013) https://doi.org/10.1117/12.2035726

KEYWORDS: Finite element methods, Sensors, Atomic force microscope, Feedback signals, Capacitance, Atomic force microscopy, Signal analysis, Calibration, Electrodes, Amplifiers

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Proceedings Article | 29 May 2013 Paper

A large range metrological atomic force microscope and its uncertainty analysis

S. Gao, Q. Li, W. Li, M. Lu, Y. Shi

Proceedings Volume 8729, 872905 (2013) https://doi.org/10.1117/12.2017674

KEYWORDS: Calibration, Head, Metrology, Interferometers, Mirrors, Atomic force microscope, Atomic force microscopy, Error analysis, Sensors, Temperature metrology

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Proceedings Article | 29 May 2013 Paper

Performance improvement of a large range metrological AFM through parasitic interference feedback artifacts removing by using laser multimode modulation method

Qi Li, Sitian Gao, Wei Li, Mingzhen Lu, Yushu Shi

Proceedings Volume 8729, 872906 (2013) https://doi.org/10.1117/12.2015663

KEYWORDS: Modulation, Semiconductor lasers, Sensors, Ferroelectric materials, Atomic force microscopy, Mirrors, Metrology, Interferometers, Laser damage threshold, Head

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Proceedings Article | 31 January 2013 Paper

Error analysis of homodyne multi-pass interferometer with Jones matrix

Wei Li, Sitian Gao, Mingzhen Lu, Yushu Shi

Proceedings Volume 8759, 87590A (2013) https://doi.org/10.1117/12.2014900

KEYWORDS: Interferometers, Polarization, Wave plates, Error analysis, Homodyne detection, Mirrors, Signal detection, Beam splitters, Transmittance, Optical components

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Proceedings Article | 31 January 2013 Paper

Long range metrological atomic force microscope with versatile measuring head

Mingzhen Lu, Sitian Gao, Qi Li, Wei Li, Yushu Shi, Xingfu Tao

Proceedings Volume 8759, 87594Y (2013) https://doi.org/10.1117/12.2014870

KEYWORDS: Head, Atomic force microscopy, Metrology, Interferometers, Mirrors, Sensors, Atomic force microscope, Scanning probe microscopy, Homodyne detection, Motion measurement

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Proceedings Article | 31 January 2013 Paper

Segmental calibration for commercial AFM in vertical direction

Yushu Shi, Sitian Gao, Mingzhen Lu, Wei Li, Xuefang Xu

Proceedings Volume 8759, 87594E (2013) https://doi.org/10.1117/12.2014859

KEYWORDS: Atomic force microscopy, Calibration, Metrology, Sensors, Standards development, Sensor calibration, Scanners, Ceramics, 3D scanning, Laser scanners

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Proceedings Article | 9 June 1992 Paper

10.6-um laser heterodyne frequency-tracking system with high stability

Yu Hu, Xian Li, Wang Kai, Ming-zhen Lu, Yujin Huang

Proceedings Volume 1635, (1992) https://doi.org/10.1117/12.59257

KEYWORDS: Laser applications, Laser stabilization, Heterodyning, Free space optical communications, Carbon dioxide lasers, Analog electronics, Lithium, Servomechanisms, Sensors, Laser systems engineering

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Showing 5 of 9 publications

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