Dr. Monique Dilhan Profile

Dr. Monique Dilhan

at Lab d'Analyse et d'Architecture des Systèmes

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Author

Publications (6)

Proceedings Article | 16 April 2011 Paper

Comparisons of the new thick negative resist to Su8 resist

D. Bourrier, M. Dilhan, A. Ghannam, H. Granier

Proceedings Volume 7972, 79722F (2011) https://doi.org/10.1117/12.870496

KEYWORDS: Photoresist processing, Copper, Photoresist materials, Electroplating, Plasma etching, Metals, Microelectromechanical systems, Etching, Semiconducting wafers, Gold

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Proceedings Article | 4 September 2008 Paper

Micro-interconnection technology suitable for RF-NEMS varactors elaboration

Sébastien Pacchini, Monique Dilhan, Thibaut Ricart, Costel Cojocaru, Didier Pribat, David Dubuc, Katia Grenier

Proceedings Volume 7037, 703719 (2008) https://doi.org/10.1117/12.795031

KEYWORDS: Silica, Silicon, Microwave radiation, Metals, Dielectrics, Nanoelectromechanical systems, Reactive ion etching, Chemical vapor deposition, Annealing, Nickel

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Proceedings Article | 26 February 2008 Paper

Micro-inductors integrated on silicon for DC-DC converters

T. El Mastouli, J.P. Laur, J.L. Sanchez, M. Brunet, D. Bourrier, M. Dilhan

Proceedings Volume 6882, 68820A (2008) https://doi.org/10.1117/12.763085

KEYWORDS: Magnetism, Chemical mechanical planarization, Electroplating, Copper, Prototyping, Silicon, Inductance, Resistance, Photoresist materials, Micromachining

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Proceedings Article | 30 December 2003 Paper

Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters

Ghislain Troussier, Jean-Pierre Laur, Jean-Louis Sanchez, David Bourrier, Veronique Conedera, Monique Dilhan, Norbert Fabre, Yves Lembeye, Herve Morel, Bruno Cogitore

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531969

KEYWORDS: Magnetism, Copper, Photoresist materials, Electroplating, Photoresist processing, Silicon, Optical lithography, Metals, Manufacturing, CMOS technology

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Proceedings Article | 18 August 1999 Paper

Reliability of microsystems based on a failure mechanism approach

S. Cruzel, Daniel Esteve, Monique Dilhan, Jean-Yves Fourniols, Francis Pressecq, O. Puig, Jean-Jacques Simonne

Proceedings Volume 3880, (1999) https://doi.org/10.1117/12.359364

KEYWORDS: Reliability, Microelectromechanical systems, Microsystems, Failure analysis, Packaging, Data modeling, Microelectronics, Reverse modeling, Radiation effects, Chemical species

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Proceedings Article | 10 March 1999 Paper

Experimentation of electrostatically actuated monochip micropump for drug delivery

Monique Dilhan, Josiane Tasselli, Daniel Esteve, Pierre Temple-Boyer, Henri Camon, Marc Anduze, Stephane Colin

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341155

KEYWORDS: Silicon, Microfluidics, Liquids, Actuators, Microsystems, Semiconducting wafers, Micromachining, Low pressure chemical vapor deposition, Prototyping, In vivo imaging

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Showing 5 of 6 publications

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