Ms. Nan Zheng Profile

Nan Zheng

at China Academy of Engineering Physics

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Author

Publications (14)

Proceedings Article | 18 March 2024 Paper

Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Qiancai Wei, Fei Fan, Bo Zhong, Nan Zheng, Jian Wang

Proceedings Volume 13104, 1310475 (2024) https://doi.org/10.1117/12.3024180

KEYWORDS: Silica, Polishing, Elastic modulus, Magnetorheological finishing, Optical surfaces, Surface finishing, Analytical research, Deformation, Materials properties, Surface properties

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Proceedings Article | 20 January 2023 Paper

Research on wear passivation law for diamond grinding wheel based on acoustic emission

Qiancai Wei, Lian Zhou, Bo Zhong, Jie Li, Nan Zheng, Hongjun Liu, Jian Wang, Qiao Xu

Proceedings Volume 12559, 1255907 (2023) https://doi.org/10.1117/12.2651863

KEYWORDS: Signal processing, Sensors, Acoustic emission, Diamond, Spindles, Abrasives, Particles, Silica, Signal attenuation, Lithium, Diamond wheels

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Proceedings Article | 7 September 2021 Paper

Material removal mechanism of single crystal silicon by bonnet polishing

Bo Zhong, Nan Zheng, Jie Li, Xian-hua Chen

Proceedings Volume 11815, 118150C (2021) https://doi.org/10.1117/12.2594614

KEYWORDS: Silicon, Polishing, Crystals, Surface finishing, Optical components, Particles, Crystal optics, Photovoltaics, Chemical elements, Chemical analysis

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Proceedings Article | 5 November 2020 Paper

Laser damage and evolution law of scratches on fused silica in etching

Xiangyang Lei, Nan Zheng, Xianhua Chen, Lian Zhou, Xi Xu, Qinghua Zhang, Jian Wang, Zhigang Yuan

Proceedings Volume 11568, 115680D (2020) https://doi.org/10.1117/12.2575700

KEYWORDS: Etching, Laser damage threshold, Laser induced damage, Wet etching, Polishing, High power lasers, Surface finishing

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Proceedings Article | 31 January 2020 Paper

Experimental research of high quality grinding technology on SiC based on grinding force

Qiancai Wei, Lian Zhou, Xianhua Chen, Shijie Zhao, Nan Zheng, Jie Li, Jian Wang

Proceedings Volume 11427, 114273M (2020) https://doi.org/10.1117/12.2553046

KEYWORDS: Silicon carbide, Surface roughness, Metals, Surface finishing, Abrasives, Diamond, Spindles, Lithium, Optics manufacturing, Reflectors

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Proceedings Article | 31 January 2020 Paper

Effects of magnetorheological processing parameters on the mid-spatial frequency errors of optics

Jing Hou, Xian-hua Chen, Shi-wei Liu, Nan Zheng, Bo Zhong, Wen-hui Deng

Proceedings Volume 11427, 114272P (2020) https://doi.org/10.1117/12.2552472

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Proceedings Article | 31 January 2020 Paper

Precision manufacture of aspheric optics by robot-based bonnet polishing

Bo Zhong, Wen-hui Deng, Xian-hua Chen, Nan Zheng

Proceedings Volume 11427, 114271Q (2020) https://doi.org/10.1117/12.2551855

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Proceedings Article | 18 November 2019 Paper

Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, Bo Zhong, Jian Wang

Proceedings Volume 11189, 111890P (2019) https://doi.org/10.1117/12.2537798

KEYWORDS: Aspheric lenses, Photovoltaics, Aspheric optics, Optics manufacturing, Polishing, Interferometers, Sensors, Optical testing, Surface finishing, Infrared radiation

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Proceedings Article | 15 November 2019 Presentation + Paper

Fabrication of continuous phase plates based on bonnet polishing

Bo Zhong, Xian-hua Chen, Wen-hui Deng, Nan Zheng, Sheng-lin Wen

Proceedings Volume 11175, 111750K (2019) https://doi.org/10.1117/12.2536464

KEYWORDS: Polishing, Manufacturing, Optics manufacturing, Diffractive optical elements

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Proceedings Article | 10 May 2019 Paper

Crack depth uniformity control techniques for large scale fused silica optics in grinding process

Lian Zhou, Nan Zheng, Xianhua Chen, Mincai Liu, Qinghua Zhang, Jian Wang, Jie Li

Proceedings Volume 11068, 1106815 (2019) https://doi.org/10.1117/12.2524151

KEYWORDS: Optical components, Particles, Diamond wheels, Glasses

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In order to improve the overall efficiency of machining and the defect quality of large aperture fused silica optics, it’s necessary to strictly control the crack defects and their depth uniformity in the first grinding process. Firstly, the morphology of three typical defects affecting the uniformity of crack depth was analyzed, which were scattered superficial sand holes, continuous linear defects and dotted linear defects. Then according to the morphology, the causes were investigated and the control techniques were proposed. The scattered superficial sand holes were caused by the large size glass powder, the diamond particles dropped from the grinding wheel and other foreign body impurities in the grinding fluid, which had been squeezed into the surface of the element by the grinding wheel. Through the clean filtration of grinding fluid, the quantity of such defects could be effectively reduced. The continuous linear defects were caused by stress concentration at the two sharp edges of the grinding wheel. Arcing the two sides of wheel could reduce the machining stress at the edges and avoid the occurrence of continuous linear defects. The dotted linear defects were caused by the stress concentration of the grooves on the surface of the wheel during grinding. After optimizing the dressing parameters to reduce the dressing force and avoid the grains of dressing wheel being embedded into the grinding wheel surface, all the grooves on the wheel surface and all the dashed line defects on the element surface disappeared practically. At the last, after integrating all the above control techniques, the grinding experiment of large scale fused silica optics was carried out. The scattered superficial sand holes, continuous linear defects and dotted linear defects on the surface of element after grinding were obviously alleviated. The crack depth of the whole aperture was between 4μm and 7μm. All the results indicated that the control techniques were efficacious.

Proceedings Article | 10 May 2019 Paper

Processing technology of magnetorheological finishing for large-aperture optical components

Jing Hou, Xianhua Chen, Jie Li, Bo Zhong, Wen-hui Deng, Nan Zheng

Proceedings Volume 11068, 110681I (2019) https://doi.org/10.1117/12.2524540

KEYWORDS: Magnetorheological finishing, Optical components, Polishing, Optics manufacturing, Surface finishing, Interferometers, Optical fabrication, Liquids, Image processing, Photovoltaics

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Proceedings Article | 10 May 2019 Paper

Influence of grinding force on aspherical small-scale waviness uniformity based on parallel grinding

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, Jian Wang

Proceedings Volume 11068, 1106817 (2019) https://doi.org/10.1117/12.2524257

KEYWORDS: Aspheric lenses, Rubidium, Aspheric optics, Mirrors, Surface finishing, Polishing, Parallel computing, Silica, Glasses, Sensors

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Proceedings Article | 5 March 2018 Paper

Improving material removal determinacy based on the compensation of tool influence function

Bo Zhong, Xian-hua Chen, Wen-hui Deng, Shi-jie Zhao, Nan Zheng

Proceedings Volume 10710, 107102P (2018) https://doi.org/10.1117/12.2314935

KEYWORDS: Polishing, Surface finishing, Photovoltaics, Optical components, Convolution, Physics, Electronic components, Error analysis, Computer simulations, Head

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Proceedings Article | 8 March 2017 Paper

Investigation of the chemical composition and atomic emission spectroscopy of fused silica in CF4 plasma processing

Huiliang Jin, Caixue Tang, Nan Zheng, Wenhui Deng, Xianhua Chen

Proceedings Volume 10255, 1025515 (2017) https://doi.org/10.1117/12.2266534

KEYWORDS: Emission spectroscopy, Silica, Plasma, Chemical species, Molecules, Molecular spectroscopy, Fluorine, Atmospheric plasma, Ionization, Electrodes

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Showing 5 of 14 publications

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