Dr. Naotada Okada Profile

Dr. Naotada Okada

Senior fellow at Toshiba Corp.

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Publications (2)

Proceedings Article | 24 March 2009 Paper

Development of optical simulation tool for defect inspection

Takayoshi Fujii, Yusaku Konno, Naotada Okada, Kiminori Yoshino, Yuuichiro Yamazaki

Proceedings Volume 7272, 72721A (2009) https://doi.org/10.1117/12.812472

KEYWORDS: Inspection, Polarization, Near field optics, Defect inspection, Finite-difference time-domain method, Dielectrics, Defect detection, Optical inspection, Near field, Optical simulations

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Proceedings Article | 19 February 2003 Paper

Thermal stimulation of laser processing of Si

Naotada Okada, Ryuichi Togawa

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486554

KEYWORDS: Silicon, Laser marking, Nd:YAG lasers, Transmittance, Semiconductor lasers, Optical simulations, Signal attenuation, Laser processing, Semiconductors, Finite element methods

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