Mr. Niels A. Lammers Profile

Niels A. Lammers

at Technische Univ Eindhoven

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 20 March 2018 Presentation + Paper

Cross-platform (NXE-NXT) machine-to-machine overlay matching supporting next node chip manufacturing

Theo Thijssen, Marcel Beckers, Albert Mollema, Leon Levasier, Alexander Padi, Chia-Wei Hung, Hsiao-Lan Chen, Laurens van Bokhoven, Niels Lammers, Jean Phillippe van Damme, Floris Teeuwisse, Robin Tijssen, Wilson Tzeng, Cathy Wang, Marcel Mastenbroek, Harald Vos, Ting-Ju Yueh, Miao-Chi Chen , Hsueh-Hung Wu, Shin-Rung Peng, Chun-Kuang Chen, L. J. Chen , Kevin Cheng, John Lin

Proceedings Volume 10587, 1058709 (2018) https://doi.org/10.1117/12.2297387

KEYWORDS: Pellicles, Reticles, Deep ultraviolet, Overlay metrology, Extreme ultraviolet, Scanners, Distortion, Extreme ultraviolet lithography, Manufacturing, Semiconducting wafers

Read Abstract +

Proceedings Article | 1 November 2007 Paper

Laser shockwave cleaning of EUV reticles

N. Lammers, A. Bleeker

Proceedings Volume 6730, 67304P (2007) https://doi.org/10.1117/12.746388

KEYWORDS: Particles, Reticles, Photons, Laser induced breakdown spectroscopy, Extreme ultraviolet, Pulsed laser operation, Semiconducting wafers, Ionization, Optical spheres, Glasses

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years