Dr. Nityan Nair Profile

Dr. Nityan Nair

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Publications (3)

Proceedings Article | 10 April 2024 Presentation

DSA materials and processes development for ≤ P24 EUV resist L/S pattern rectification

Eungnak Han, Gurpreet Singh, Tayseer Mahdi, Robert Seidel, Sandra Murcia, Lauren Doyle, Nityan Nair, Nafees Kabir, Sean Pursel, David Shykind, Todd Hoppe, Florian Gstrein

Proceedings Volume PC12956, PC129560P (2024) https://doi.org/10.1117/12.3012612

KEYWORDS: Directed self assembly, Extreme ultraviolet, Materials processing, Extreme ultraviolet lithography, Block copolymers, Surface roughness, Scanners, Optical lithography, Objectives, Fabrication

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Proceedings Article | 10 April 2024 Presentation

Directed self-assembly enhanced EUV multi-patterning for low variability metal pitch scaling

Gurpreet Singh, Nityan Nair, Florian Gstrein, Richard Schenker

Proceedings Volume PC12953, PC129530G (2024) https://doi.org/10.1117/12.3010031

KEYWORDS: Metals, Directed self assembly, Extreme ultraviolet, Double patterning technology, Reliability, Data modeling, Optical lithography, Dielectric breakdown, Design and modelling, Data processing

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Proceedings Article | 22 February 2018 Paper

Giant anisotropic nonlinear optical response in Weyl semimetals

Shreyas Patankar, Nityan Nair, James Analytis, Joseph Orenstein, Liang Wu

Proceedings Volume 10530, 1053003 (2018) https://doi.org/10.1117/12.2289394

KEYWORDS: Second-harmonic generation, Polarization, Metalloids, Crystals, Gallium arsenide, Nonlinear optics, Harmonic generation, Dielectrics, Polarizers, Metals

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