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Noah Leibowitz
at ASML
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 November 2019 Presentation + Paper
Material removal for small compressions on fused silica on an OptiPro UltraForm Finishing machine
Noah Leibowitz, John Lambropoulos, Michael Pomerantz
Proceedings Volume 11175, 111750I (2019) https://doi.org/10.1117/12.2536595
KEYWORDS: Silica, Surface finishing, Metrology, Abrasives, 3D metrology, Glasses, Diamond, Polishing, Spindles, Optics manufacturing
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