Mr. Norihiro Yamamoto Profile

Norihiro Yamamoto

Sr. Manager Engineering

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Publications (2)

Proceedings Article | 26 March 2007 Paper

Polarization aberration analysis using Pauli-Zernike representation

Norihiro Yamamoto, Jongwook Kye, Harry Levinson

Proceedings Volume 6520, 65200Y (2007) https://doi.org/10.1117/12.711336

KEYWORDS: Polarization, Apodization, Pellicles, Transmittance, Matrices, Reticles, Jones matrices, Lithography, Critical dimension metrology, Zernike polynomials

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Proceedings Article | 21 March 2006 Paper

Mask topography effect with polarization at hyper NA

Norihiro Yamamoto, Jongwook Kye, Harry Levinson

Proceedings Volume 6154, 61544F (2006) https://doi.org/10.1117/12.657155

KEYWORDS: Photomasks, Polarization, Critical dimension metrology, Diffraction, Refractive index, Phase shifts, Binary data, Lithographic illumination, Optical testing, Mineralogy

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