Mr. Parthasarathy Venkataraman Profile

Parthasarathy Venkataraman

at Rochester Institute of Technology

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Publications (2)

Proceedings Article | 5 July 2000 Paper

Aberrations of steppers using phase-shifting point diffraction interferometry

Parthasarathy Venkataraman, Bruce Smith

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388962

KEYWORDS: Interferometry, Diffraction, Phase shifting, Phase shifts, Photomasks, Optical testing, Prototyping, Spatial filters, Image quality, Monochromatic aberrations

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Proceedings Article | 5 June 1998 Paper

Materials for reflective multilayer coatings for EUV wavelengths

Bruce Smith, Parthasarathy Venkataraman, Santosh Kurinec, R. Mackay

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309614

KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet, Optical coatings, Molybdenum, Silicon, Interfaces, Beryllium, Thin film coatings, Mirrors

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