Ms. Patricia D. Beard Profile

Patricia D. Beard

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Publications (3)

Proceedings Article | 8 December 1995 Paper

Manufacturing and inspection of OPC and PSM masks

Wolfgang Staud, Karen Huang, Patricia Beard, Ofer Hebron, Yair Eran

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228214

KEYWORDS: Inspection, Transmittance, Photomasks, Optical proximity correction, Opacity, Manufacturing, Phase measurement, Databases, Defect detection, Phase shifts

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Proceedings Article | 1 May 1994 Paper

Die-to-database inspection and defect specification

Yair Eran, Ido Weinberg, Patricia Beard

Proceedings Volume 2196, (1994) https://doi.org/10.1117/12.174124

KEYWORDS: Inspection, Defect inspection, Image processing, Photomasks, Semiconducting wafers, Tolerancing, Databases

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Proceedings Article | 15 February 1994 Paper

Die-to-database inspection using high accuracy database representation

Nissim Elmaliach, Yair Eran, Shiree Shafrir, Carla Thoe, Patricia Beard

Proceedings Volume 2087, (1994) https://doi.org/10.1117/12.167263

KEYWORDS: Databases, Inspection, Computer aided design, Raster graphics, Data modeling, Visualization, Scanners, Photomask technology, Visual process modeling, Solid modeling

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