Dr. Peter Gnauck Profile

Dr. Peter Gnauck

at Raith GmbH

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Publications (2)

Proceedings Article | 16 January 2003 Paper

A new SEM/FIB crossbeam inspection tool for high-resolution materials and device characterization

Peter Gnauck, Peter Hoffrogge

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476340

KEYWORDS: Scanning electron microscopy, Image resolution, Ion beams, Ions, Imaging systems, Scanning tunneling microscopy, Image processing, Gemini Observatory, Metals, Transmission electron microscopy

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Proceedings Article | 16 July 2002 Paper

New crossbeam inspection tool combining an ultrahigh-resolution field emission SEM and a high-resolution FIB

Peter Gnauck, Peter Hoffrogge, Jens Greiser

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473530

KEYWORDS: Scanning electron microscopy, Ion beams, Ions, Image resolution, Imaging systems, Gemini Observatory, Transmission electron microscopy, Gases, Metals, Inspection

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