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Philipp Brendel
at Fraunhofer IISB
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Publications (4)
Proceedings Article | 30 April 2023 Presentation
Training data selection and optimization for EUV lithography deep learning models
Proceedings Volume 12495, 124951I (2023) https://doi.org/10.1117/12.2658411
KEYWORDS: Data modeling, Lithography, Scanning electron microscopy, Extreme ultraviolet lithography, Computer simulations
Proceedings Article | 13 June 2022 Presentation
Data efficient deep learning for imaging with novel EUV mask absorbers
Abdalaziz Awad, Philipp Brendel, Andreas Erdmann
Proceedings Volume PC12051, PC120510H (2022) https://doi.org/10.1117/12.2613954
KEYWORDS: Data modeling, Photomasks, Extreme ultraviolet, Waveguides, Waveguide modes, Lithography
SPIE Journal Paper | 16 November 2021 Open Access
Accurate prediction of EUV lithographic images and 3D mask effects using generative networks
JM3, Vol. 20, Issue 04, 043201, (November 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.043201
KEYWORDS: 3D modeling, Photomasks, 3D image processing, Extreme ultraviolet, Data modeling, Lithography, Extreme ultraviolet lithography, Process modeling, Computer programming, 3D acquisition
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Proceedings Article | 12 September 2021 Presentation
Accurate prediction of EUV lithographic images using data-efficient generative networks
Proceedings Volume 11875, 118750I (2021) https://doi.org/10.1117/12.2597309
KEYWORDS: 3D modeling, Photomasks, Data modeling, Extreme ultraviolet, Lithography, 3D image processing, Extreme ultraviolet lithography, Image processing, Computer simulations, Machine learning
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