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Dr. Placid Ferreira
Grayce Wicall Gauthier Prof of Mech Sci and Engg at Univ of Illinois
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Publications (4)
Proceedings Article | 7 February 2009 Paper
Beam forming of light from structured metal nano-aperture vertical cavity lasers
Proceedings Volume 7229, 72290H (2009) https://doi.org/10.1117/12.813410
KEYWORDS: Vertical cavity surface emitting lasers, Metals, Silver, Surface plasmons, Near field, Optical lithography, Finite-difference time-domain method, Oxides, Mirrors, Chromium
Proceedings Article | 9 September 2008 Paper
Self-calibration of a dual-actuated single-axis nanopositioner using measurement transitivity with extensions to calibration of two-axis systems
Young Hun Jeong, Jingyan Dong, Placid Ferreira
Proceedings Volume 7042, 704206 (2008) https://doi.org/10.1117/12.796101
KEYWORDS: Sensors, Calibration, Error analysis, Prisms, Sensor calibration, Metrology, Nanotechnology, Laser interferometry, Actuators, Statistical analysis
Proceedings Article | 26 February 2008 Paper
Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators
Proceedings Volume 6882, 688209 (2008) https://doi.org/10.1117/12.762358
KEYWORDS: Kinematics, Actuators, Silicon, Aluminum, Etching, Fabrication, Finite element methods, Sensors, Optical lithography, Plasma
Proceedings Article | 1 July 2005 Paper
Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.605632
KEYWORDS: Kinematics, Actuators, Silicon, Semiconducting wafers, Crystals, Metals, Sensors, Silica, Photomasks, Microfabrication
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