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Qiang Cheng
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Publications (1)
Proceedings Article | 19 December 2022 Poster + Paper
Research on interferometric inspection of surface topography of ring elements
Proceedings Volume 12319, 123191F (2022) https://doi.org/10.1117/12.2643403
KEYWORDS: Inspection, Interferometers, Interferometry, Technology, Spherical lenses, Design and modelling, Optical components, Equipment, Mirrors, Metals
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