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Qiuping Nie
Product Manager at YWTK
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Publications (2)
Proceedings Article | 10 December 2024 Paper
Method for improving overlay accuracy
Qiuping Nie, Yanping Lan, Jie Li
Proceedings Volume 13423, 134231N (2024) https://doi.org/10.1117/12.3055263
KEYWORDS: Overlay metrology, Signal processing, Light sources, Wavelets, Image processing, Tunable filters, Signal filtering, Electronic filtering, Principal component analysis, Interference (communication)
Proceedings Article | 16 October 2017 Paper
Dark field technology for EUV and optical mask blank inspection
Qiuping Nie, David Aupperle, Alexander Tan, Bill Kalsbeck, Qiang Zhang, Gregg Inderhees
Proceedings Volume 10451, 104511D (2017) https://doi.org/10.1117/12.2281057
KEYWORDS: Inspection, Extreme ultraviolet, Photomasks, Reticles, Scattering, Light scattering, Particles, EUV optics, Defect detection, Optics manufacturing
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