Dr. Ryoichi Hajima Profile

Dr. Ryoichi Hajima

at QST

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Publications (1)

SPIE Journal Paper | 25 June 2022 Open Access

High power light source for future extreme ultraviolet lithography based on energy-recovery linac free-electron laser

Hiroshi Kawata, Norio Nakamura, Hiroshi Sakai, Ryukou Kato, Ryoichi Hajima

JM3, Vol. 21, Issue 02, 021210, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021210

KEYWORDS: Free electron lasers, Light sources, Extreme ultraviolet lithography, Extreme ultraviolet, Electron beams, Mirrors, Scanners, Tin, Magnetism, Niobium

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