Ms. Sachiko Yabe Profile

Sachiko Yabe

at SELETE

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Publications (2)

Proceedings Article | 10 May 2005 Paper

Monitoring system of effective exposure dose and focus

Sachiko Yabe, Akiyuki Minami, Takashi Nasuno, Yoshihisa Matsubara, Koichiro Tsujita

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598598

KEYWORDS: Metals, Semiconducting wafers, Overlay metrology, Critical dimension metrology, Reflectivity, Metrology, Semiconductors, Measurement devices, Lithography, Control systems

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Proceedings Article | 10 May 2005 Paper

Study of segmented overlay mark fidelity based on electrical property of device

Akiyuki Minami, Sachiko Yabe, Takashi Nasuno, Yoshihisa Matsubara, Koichiro Tsujita

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598654

KEYWORDS: Metals, Overlay metrology, Resistance, Personal protective equipment, Optical proximity correction, Copper, Neodymium, Monochromatic aberrations, Measurement devices, Semiconducting wafers

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