Mr. Sami K. Myllymaki Profile

Sami K. Myllymaki

at Univ of Oulu

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Publications (2)

SPIE Journal Paper | 1 April 2010

Dual-dome micromechanical resonator fabricated with reactive ion etching and plasma-enhanced chemical vapor deposition techniques

Sami Myllymaki

JM3, Vol. 9, Issue 02, 023012, (April 2010) https://doi.org/10.1117/12.10.1117/1.3435350

KEYWORDS: Resonators, Silicon, Semiconducting wafers, Microresonators, Reactive ion etching, Electrodes, Capacitance, Silicon films, Domes, Plasma enhanced chemical vapor deposition

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Proceedings Article | 24 April 2003 Paper

Circular RF MEMS resonator solutions for 100- to 10-nm SOI structures

Sami Myllymaki, E. Ristolainen, P. Heino, A. Lehto, K. Varjonen

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499329

KEYWORDS: Resonators, Transistors, Microelectromechanical systems, Silicon, Device simulation, Thin films, Silicon films, Finite element methods, Electrodes, Electronics

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