Dr. Samir S. Ellwi Profile

Dr. Samir S. Ellwi

EUV Dev Manager at Adlyte

SPIE Involvement:

Author

Publications (8)

SPIE Journal Paper | 11 June 2012

Laser-produced plasma light source for extreme-ultraviolet lithography applications

Reza Abhari, Bob Rollinger, Andrea Giovannini, Oran Morris, Ian Henderson, Samir Ellwi

JM3, Vol. 11, Issue 02, 021114, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021114

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Extreme ultraviolet lithography, Ions, Light sources, Mirrors, Lithography, Inspection, Laser applications

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Proceedings Article | 8 April 2011 Paper

EUV brightness, spot size, and contamination measurements at the intermediate focus

Andrea Giovannini, Oran Morris, Ian Henderson, Samir Ellwi, Reza Abhari

Proceedings Volume 7969, 79692X (2011) https://doi.org/10.1117/12.879598

KEYWORDS: Extreme ultraviolet, Mirrors, Contamination, Plasma, Coded apertures, Optical filters, Charge-coupled devices, Extreme ultraviolet lithography, Tin, Zirconium

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Proceedings Article | 29 March 2011 Paper

High-brightness LPP source for actinic mask inspection

S. Ellwi, F. Abreau

Proceedings Volume 7969, 79690C (2011) https://doi.org/10.1117/12.879786

KEYWORDS: Extreme ultraviolet, Inspection, Photomasks, Tin, Extreme ultraviolet lithography, Metrology, Plasma, Light sources, Solids, Manufacturing

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Proceedings Article | 28 February 2009 Paper

Industrial applications of high-average power high-peak power nanosecond pulse duration Nd:YAG lasers

Paul Harrison, Samir Ellwi

Proceedings Volume 7193, 71932A (2009) https://doi.org/10.1117/12.814857

KEYWORDS: Optical lithography, Glasses, Thin films, Laser ablation, Laser applications, Laser processing, Coating, Nd:YAG lasers, Electrodes, Plasma display panels

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Proceedings Article | 6 May 2005 Paper

Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source

Samir Ellwi, Andrew Comley, Nick Hay, Ian Henderson, Michael Brownell

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598721

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Multiplexing, Plasma, Semiconductor lasers, Xenon, Laser applications, Diodes, Tin, Laser development

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Proceedings Article | 20 September 2004 Paper

A high-power short-pulse laser for EUV source generation using laser-produced plasma and achieving low cost of ownership

Andy Comley, Samir Ellwi, Nick Hay, Michael Brownell

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.549228

KEYWORDS: Extreme ultraviolet, Plasma, Xenon, Multiplexing, Pulsed laser operation, High power lasers, Tin, Extreme ultraviolet lithography, Laser development, CCD cameras

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Proceedings Article | 20 May 2004 Paper

High-power short-pulse laser modules for laser-produced-plasma EUV source

Samir Ellwi, Andrew Comley, N. Hay, Michael Brownell

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534015

KEYWORDS: Extreme ultraviolet, Xenon, Plasma, High power lasers, Tin, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Laser development, Laser applications

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Proceedings Article | 13 September 2002 Paper

EUV light source and laser considerations for scalability and high-energy conversion efficiency

Ian Mercer, Andrew Comley, Sebastian Davis-Ansted, Michael Egan, Samir Ellwi, Paul Harrison, Ian Henderson, Matt Kelly, Michael Mason, Mark Middleton, Ian Morris, Duncan Parsons-Karavassilis, Terrance Nowell, Peter Raven, Adrain Russel, David Klug, Alan Taylor

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482129

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, EUV optics, Switching, Laser energy, Multiplexing, Laser optics, Diodes, Semiconductor lasers

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Showing 5 of 8 publications

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