Mr. Sang Geun Yun Profile

Sang Geun Yun

at SAMSUNG SDI Co Ltd

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Publications (1)

Proceedings Article | 31 March 2010 Paper

Novel topcoat materials with improved receding angles and dissolution properties for ArF immersion lithography

Sang Geun Yun, Jin Young Lee, Young Soo Yang, Seung Wook Shin, Sung Jae Lee, Hyo Young Kwon, Youn Jin Cho, Seung Jib Choi, Sang Jun Choi, Jong Seob Kim, Tuwon Chang

Proceedings Volume 7639, 763921 (2010) https://doi.org/10.1117/12.848328

KEYWORDS: Polymers, Lithography, Immersion lithography, Fluorine, Silicon, Liquids, Polymer thin films, Semiconducting wafers, Photoresist materials, Spectroscopy

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