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Dr. Seokhan Park
at Samsung Electronics
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Publications (1)
Proceedings Article | 21 March 2017 Presentation + Paper
Free energy modeling of block-copolymer within pillar confinements on DSA lithography
Seokhan Park, Joonsoo Park, Jemin Park, Hyun-Woo Kim, Changhyun Cho, Hyeongsun Hong, Kyupil Lee, ES Jung
Proceedings Volume 10144, 101440F (2017) https://doi.org/10.1117/12.2257638
KEYWORDS: Polymethylmethacrylate, Polymers, Lithography, Thermodynamics, Silica, Optical spheres, Directed self assembly, Picosecond phenomena, Semiconductors, Scanning electron microscopy, Extreme ultraviolet, Etching, Optical lithography
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