Dr. Sergiy Yulin Profile

Dr. Sergiy Yulin

at Fraunhofer IOF

SPIE Involvement:

Author

Publications (40)

Proceedings Article | 13 March 2015 Paper

Advanced coatings for next generation lithography

P. Naujok, Sergiy Yulin, N. Kaiser, A. Tünnermann

Proceedings Volume 9422, 94221K (2015) https://doi.org/10.1117/12.2085764

KEYWORDS: Mirrors, Reflectivity, Multilayers, Interfaces, Lanthanum, Lithography, Extreme ultraviolet lithography, Diffusion, Optical properties, Annealing

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Proceedings Article | 1 April 2013 Paper

Lifetime and refurbishment of multilayer LPP collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Silvia de Dea, Kay Hoffmann, Bruno La Fontaine, Igor Fomenkov, David Brandt

Proceedings Volume 8679, 86790C (2013) https://doi.org/10.1117/12.2015492

KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Optical coatings, Light sources, EUV optics, Tin

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Proceedings Article | 13 September 2012 Paper

Optical reflector coatings for astronomical applications from EUV to IR

Mark Schürmann, Paul Johannes Jobst, Sergiy Yulin, Torsten Feigl, Hanno Heiße, Steffen Wilbrandt, Olaf Stenzel, Andreas Gebhardt, Stefan Risse, Norbert Kaiser

Proceedings Volume 8450, 84502K (2012) https://doi.org/10.1117/12.925425

KEYWORDS: Optical coatings, Reflectivity, Silver, Mirrors, Metals, Polishing, Optics manufacturing, Reflectors, Astronomy, Amorphous silicon

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Proceedings Article | 23 March 2012 Paper

Optical performance of LPP multilayer collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Marcus Trost, Sven Schröder, Angela Duparré, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Kay Hoffmann, Bruno La Fontaine, Kevin Cummings

Proceedings Volume 8322, 832217 (2012) https://doi.org/10.1117/12.919735

KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, EUV optics, Light sources, Plasma, Extreme ultraviolet lithography, Light scattering

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Proceedings Article | 19 May 2011 Paper

Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 8077, 80770X (2011) https://doi.org/10.1117/12.891803

KEYWORDS: Extreme ultraviolet lithography, Carbon, Extreme ultraviolet, Contamination, Reflectivity, Mirrors, EUV optics, Gases, Synchrotron radiation, Wafer-level optics

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Proceedings Article | 26 March 2011 Paper

Optics contamination studies in support of high-throughput EUV lithography tools

S. Hill, N. Faradzhev, L. Richter, S. Grantham, C. Tarrio, T. Lucatorto, S. Yulin, M. Schürmann, V. Nesterenko, T. Feigl

Proceedings Volume 7969, 79690M (2011) https://doi.org/10.1117/12.879852

KEYWORDS: Contamination, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Carbon, Molecules, Synchrotrons, Mirrors, Ruthenium, Spectroscopic ellipsometry

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Proceedings Article | 23 March 2010 Paper

Multi-technique study of carbon contamination and cleaning of Mo/Si mirrors exposed to pulsed EUV radiation

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 7636, 76361P (2010) https://doi.org/10.1117/12.848197

KEYWORDS: Carbon, Extreme ultraviolet lithography, Contamination, Reflectivity, Extreme ultraviolet, Mirrors, Silicon, Bioalcohols, X-rays, Oxidation

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Proceedings Article | 25 September 2008 Paper

High performance EUV multilayer optics

Norbert Kaiser, Sergiy Yulin, Marco Perske, Torsten Feigl

Proceedings Volume 7101, 71010Z (2008) https://doi.org/10.1117/12.796150

KEYWORDS: Multilayers, Reflectivity, Mirrors, Extreme ultraviolet, Extreme ultraviolet lithography, Interfaces, EUV optics, Carbon, Annealing, Thermography

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Proceedings Article | 3 September 2008 Paper

Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Torsten Feigl, Sergiy Yulin, Marco Perske, Hagen Pauer, Mark Schürmann, Norbert Kaiser, Norbert Böwering, Oleg Khodykin, Igor Fomenkov, David Brandt

Proceedings Volume 7077, 70771W (2008) https://doi.org/10.1117/12.802322

KEYWORDS: Reflectivity, Mirrors, Coating, Extreme ultraviolet, Multilayers, Silicon, Molybdenum, Annealing, Interfaces, Plasma

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Proceedings Article | 20 March 2008 Paper

Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Ming Fang, Manish Chandhok

Proceedings Volume 6921, 692118 (2008) https://doi.org/10.1117/12.772653

KEYWORDS: Reflectivity, Multilayers, Mirrors, Extreme ultraviolet lithography, Silicon, Carbon, Molybdenum, Extreme ultraviolet, Oxidation, Titanium dioxide

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Proceedings Article | 20 March 2008 Paper

Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments

S. Hill, N. Faradzhev, C. Tarrio, T. Lucatorto, T. Madey, B. Yakshinskiy, E. Loginova, S. Yulin

Proceedings Volume 6921, 692117 (2008) https://doi.org/10.1117/12.772627

KEYWORDS: Reflectivity, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Carbon, Ruthenium, Reflectometry, Solids, Molecules, Oxidation

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Proceedings Article | 28 September 2007 Paper

High-performance multilayer coatings for 106 nm

Elena Taracheva, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 6705, 67050Y (2007) https://doi.org/10.1117/12.735482

KEYWORDS: Reflectivity, Optical coatings, Multilayers, Laser induced fluorescence, Surface roughness, Atomic force microscopy, Silicon, Vacuum ultraviolet, Aluminum, Optical properties

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Proceedings Article | 29 August 2006 Paper

EUV multilayer mirrors with enhanced stability

Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 6317, 63170K (2006) https://doi.org/10.1117/12.680719

KEYWORDS: Mirrors, Reflectivity, Annealing, Silicon, Extreme ultraviolet, Multilayers, Molybdenum, Interfaces, Extreme ultraviolet lithography, Oxidation

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Proceedings Article | 24 March 2006 Paper

High-temperature LPP collector mirror

Torsten Feigl, Sergiy Yulin, Nicolas Benoit, Norbert Kaiser, Norbert Böwering, Alex Ershov, Oleh Khodykin, John Viatella, Kent Bruzzone, Igor Fomenkov, David Myers

Proceedings Volume 6151, 61514A (2006) https://doi.org/10.1117/12.662138

KEYWORDS: Mirrors, Reflectivity, Multilayers, Coating, Extreme ultraviolet, Silicon, Annealing, Atomic force microscopy, Silicon carbide, Temperature metrology

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Proceedings Article | 5 October 2005 Paper

High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5963, 59631T (2005) https://doi.org/10.1117/12.624868

KEYWORDS: Reflectivity, Multilayers, Mirrors, X-rays, Scandium, Crystals, Transmission electron microscopy, Absorption, Chromium, Interfaces

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Proceedings Article | 5 October 2005 Paper

Interface-engineered multilayer mirrors

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5963, 59630U (2005) https://doi.org/10.1117/12.624861

KEYWORDS: Reflectivity, Silicon carbide, Multilayers, Mirrors, Interfaces, Carbon, Annealing, Extreme ultraviolet lithography, Diffusion, Silicon

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Proceedings Article | 6 May 2005 Paper

High-temperature multilayers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.617535

KEYWORDS: Multilayers, Mirrors, Reflectivity, Annealing, Silicon, Optical properties, Extreme ultraviolet, Interfaces, Transmission electron microscopy, Optical coatings

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Proceedings Article | 21 February 2005 Paper

New challenges for VUV-XUV radiation resistant coatings

Alexandre Gatto, Joerg Heber, Minghong Yang, Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.583583

KEYWORDS: Vacuum ultraviolet, Optical coatings, Mirrors, Micromirrors, Ultraviolet radiation, Reflectivity, Thin film coatings, Thin films, Aluminum, Optical components

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Proceedings Article | 27 January 2005 Paper

EUV/soft x-ray multilayer optics

Sergiy Yulin, Torsten Feigl, Nicolas Benoit, Norbert Kaiser

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.579520

KEYWORDS: Reflectivity, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Molybdenum, Silicon, Extreme ultraviolet lithography, X-ray optics, Sputter deposition

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Proceedings Article | 25 February 2004 Paper

EUV and soft x-ray multilayer optics

Norbert Kaiser, Sergiy Yulin, Torsten Feigl, Helmut Bernitzki, Hans Lauth

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512502

KEYWORDS: Reflectivity, Mirrors, Multilayers, X-rays, Extreme ultraviolet, X-ray optics, EUV optics, Silicon, Scandium, Transmission electron microscopy

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Proceedings Article | 13 January 2004 Paper

High-performance Cr/Sc multilayers for the soft x-ray range

Sergiy Yulin, Franz Schaefers, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.505688

KEYWORDS: Reflectivity, Mirrors, Multilayers, X-rays, Chromium, Absorption, Interfaces, Annealing, Transmission electron microscopy, Optical components

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Proceedings Article | 13 January 2004 Paper

Enhanced reflectivity and stability of Sc/Si multilayers

Sergiy Yulin, Franz Schaefers, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.505582

KEYWORDS: Reflectivity, Multilayers, Mirrors, Scandium, Silicon, Chromium, Interfaces, Diffusion, Transmission electron microscopy, X-rays

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Proceedings Article | 4 November 2003 Paper

At-wavelength metrology on Sc-based multilayers for the UV and water window

Franz Schaefers, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505695

KEYWORDS: Reflectivity, Multilayers, X-rays, Mirrors, Metrology, Ultraviolet radiation, Optical coatings, Scandium, Absorption, Silicon

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Proceedings Article | 16 June 2003 Paper

Spectral reflectance tuning of EUV mirrors for metrology applications

Sergiy Yulin, Thomas Kuhlmann, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482644

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, Multilayers, Reflection, Plasma, Stochastic processes, Metrology, Silicon, Xenon

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Proceedings Article | 27 December 2002 Paper

High-performance 6-in. EUV mask blanks produced under real production conditions by ion-beam sputter deposition

Hans Becker, Frank Sobel, Lutz Aschke, Markus Renno, Juergen Krieger, Ute Buttgereit, Guenter Hess, Frank Lenzen, Konrad Knapp, Sergey Yulin, Torsten Feigl, Thomas Kuhlmann, Norbert Kaiser

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467578

KEYWORDS: Reflectivity, Multilayers, Particles, Extreme ultraviolet, Ion beams, Transmission electron microscopy, Silicon, Sputter deposition, Interfaces, Reflectometry

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Proceedings Article | 24 December 2002 Paper

Reflectivity and stability of Cr/Sc multilayers for the soft x-ray range

Sergiy Yulin, Thomas Kuhlmann, Torsten Feigl, Norbert Kaiser

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451350

KEYWORDS: Multilayers, Reflectivity, Mirrors, X-rays, Chromium, Transmission electron microscopy, Crystals, Annealing, X-ray microscopy, Sputter deposition

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Proceedings Article | 24 December 2002 Paper

EUV multilayer mirrors with tailored spectral reflectivity

Thomas Kuhlmann, Sergey Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451348

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, Multilayers, Reflection, Plasma, Molybdenum, Silicon, Stochastic processes, Sputter deposition

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Proceedings Article | 1 July 2002 Paper

Ion beam sputter deposition of low-defect EUV mask blanks on 6-in. LTEM substrates in a real production environment

Hans Becker, Lutz Aschke, Birgit Schubert, Juergen Krieger, Frank Lenzen, Sergey Yulin, Torsten Feigl, Thomas Kuhlmann, Norbert Kaiser

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472326

KEYWORDS: Multilayers, Extreme ultraviolet, Ion beams, Reflectivity, Transmission electron microscopy, Molybdenum, Interfaces, Atomic force microscopy, Reflection, Sputter deposition

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Proceedings Article | 1 July 2002 Paper

Design and fabrication of broadband EUV multilayer mirrors

Thomas Kuhlmann, Sergey Yulin, Torsten Feigl, Norbert Kaiser, Helmut Bernitzki, Hans Lauth

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472327

KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Reflection, Stochastic processes, Molybdenum, Silicon, Sputter deposition

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Proceedings Article | 20 December 2001 Paper

Damage resistant and low-stress Si-based multilayer mirrors

Torsten Feigl, Sergey Yulin, Thomas Kuhlmann, Norbert Kaiser

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450958

KEYWORDS: Reflectivity, Multilayers, Mirrors, Annealing, Extreme ultraviolet lithography, Extreme ultraviolet, Sputter deposition, Molybdenum, Silicon, Temperature metrology

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Proceedings Article | 20 August 2001 Paper

Damage-resistant and low stress EUV multilayer mirrors

Sergey Yulin, Thomas Kuhlmann, Torsten Feigl, Norbert Kaiser

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436715

KEYWORDS: Reflectivity, Multilayers, Mirrors, Annealing, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Silicon, Sputter deposition, Near infrared

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Proceedings Article | 8 November 2000 Paper

Si-based multilayers with high thermal stability

Norbert Kaiser, Sergey Yulin, Torsten Feigl

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406670

KEYWORDS: Reflectivity, Molybdenum, Near infrared, Interfaces, Silicon, Multilayers, Annealing, Mirrors, X-rays, Sputter deposition

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Proceedings Article | 21 July 2000 Paper

Magnetron sputtered EUV mirrors with high-thermal stability

Torsten Feigl, Sergey Yulin, Norbert Kaiser, Roland Thielsch

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390079

KEYWORDS: Reflectivity, Multilayers, Molybdenum, Silicon, Near infrared, Interfaces, Mirrors, Extreme ultraviolet, Annealing, X-rays

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Proceedings Article | 25 September 1995 Paper

Stigmatic high-resolution high-throughput XUV spectroscopic instruments employing unconventional optical components

Eugene Ragozin, Nikolai Kolachevsky, Mikhail Mitropolsky, Yurii Pokrovsky, Anatoli Fedorenko, V. Kondratenko, S. Yulin

Proceedings Volume 2520, (1995) https://doi.org/10.1117/12.221645

KEYWORDS: Plasma, Spectral resolution, Spectroscopy, Mirrors, Extreme ultraviolet, Spatial resolution, Reflection, Multilayers, Solids, Magnesium

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Proceedings Article | 20 June 1995 Paper

Multilayer x-ray optics with enhanced thermal and radiation stability

Anatoli Fedorenko, V. Kondratenko, E. Bugaev, Yurii Pershin, A. Ponomarenko, O. Poltseva, I. Kopylets, S. Yulin, E. Zubarev

Proceedings Volume 2515, (1995) https://doi.org/10.1117/12.212589

KEYWORDS: Reflectivity, Mirrors, Interfaces, X-rays, Annealing, Multilayers, Silicon, Molybdenum, X-ray optics, Crystals

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Proceedings Article | 23 January 1995 Paper

Space test of Mo-Si, MoSi2-Si, W-Si, and WSi2-Si x-ray multilayer mirrors on the Russian orbital station Mir

Anatoli Fedorenko, V. Kondratenko, L. Palatnik, S. Yulin, E. Zubarev, V. Nikitskiy, S. Ryabukha

Proceedings Volume 2453, (1995) https://doi.org/10.1117/12.200275

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Proceedings Article | 23 January 1995 Paper

Thermally induced structural and phase transformations of Mo-Si and MoSi2-Si x-ray multilayer mirrors

Anatoli Fedorenko, A. Garbuz, V. Kondratenko, Yurii Pershin, V. Pukha, O. Poltseva, S. Yulin, E. Zubarev

Proceedings Volume 2453, (1995) https://doi.org/10.1117/12.200276

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Proceedings Article | 1 February 1994 Paper

Stigmatic high-resolution high-throughput narrowband diffraction spectrograph employing multilayer mirrors

Eugene Ragozin, Nikolai Kolachevsky, Mikhail Mitropolsky, Anatoli Fedorenko, V. Kondratenko, S. Yulin

Proceedings Volume 2012, (1994) https://doi.org/10.1117/12.167388

KEYWORDS: Mirrors, Reflection, Spectral resolution, Diffraction, Diffraction gratings, Plasma, Spectrographs, Spectroscopes, Plasma spectroscopy, Reflectivity

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Proceedings Article | 1 February 1994 Paper

Soft x-ray submicrometer imaging experiments with nanosecond exposure

Igor Artioukov, Alexander Vinogradov, Anatoli Fedorenko, V. Kondratenko, S. Yulin

Proceedings Volume 2012, (1994) https://doi.org/10.1117/12.167385

KEYWORDS: X-rays, Mirrors, Objectives, X-ray imaging, Multilayers, Microscopes, Reflectivity, Coating, X-ray optics, Plasma

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Proceedings Article | 1 February 1994 Paper

Synthesis and measurement of normal incidence x-ray multilayer mirrors optimized for a photon energy of 390 eV

Anatoli Fedorenko, V. Kondratenko, Yurii Pershin, S. Yulin, E. Zubarev, Howard Padmore, K. Cheung, Gert van Dorssen, M. Roper, Igor Kozhevnikov, L. Balakireva, Alexander Vinogradov

Proceedings Volume 2012, (1994) https://doi.org/10.1117/12.167386

KEYWORDS: Reflectivity, Mirrors, Multilayers, Silicon, Scandium, X-rays, Sputter deposition, Sensors, Interfaces, Tungsten

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Showing 5 of 40 publications

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