Dr. Shuichi Noda Profile

Dr. Shuichi Noda

at Tohoku Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 November 2016 Paper

S. Samukawa, Shuichi Noda, Akio Higo, Manabu Yasuda, Kazumi Wada

Proceedings Volume 10027, 100270Q (2016) https://doi.org/10.1117/12.2247702

KEYWORDS: Nanowires, Etching, Nanolithography, Luminescence, Germanium, Silicon, Gallium arsenide, Iron, Ions, Plasma

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Keywords/Phrases