Dr. Sillon Nicolas Profile

Dr. Sillon Nicolas

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 20 January 2003 Paper

Wilfrid Schwartz, Claire Divoux, Jacques Margail, Laurent Jocou, Julien Charton, Eric Stadler, Thomas Jager, Fabrice Casset, T. Enot

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477924

KEYWORDS: Actuators, Silicon, Mirrors, Adaptive optics, Polymers, Deformable mirrors, Etching, Polymeric actuators, Electrodes, Dry etching

Proceedings Article | 15 January 2003 Paper

Stephane Caplet, Nicolas Sillon, Marie-Therese Delaye, Pascale Berruyer

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478249

KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, Glasses, Packaging, Wafer bonding, Manufacturing, Ceramics, Metals, Etching

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