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Simon Wingar
Research Council Officer at National Research Council Canada
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Publications (1)
Proceedings Article | 21 March 2007 Paper
Fabrication of fine pitch gratings by holography, electron-beam lithography, and nano-imprint lithography
Darren Goodchild, Alexei Bogdanov, Simon Wingar, Bill Benyon, Nak Kim, Frank Shepherd
Proceedings Volume 6517, 651734 (2007) https://doi.org/10.1117/12.712212
KEYWORDS: Holography, Electron beam lithography, Lithography, Semiconducting wafers, Reflectivity, Diffraction gratings, Scanning electron microscopy, Manufacturing, Fabrication, Photoresist materials
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