Prof. Sitian Gao Profile

Prof. Sitian Gao

at National Institute of Metrology

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Author

Publications (20)

Proceedings Article | 13 November 2019 Paper

A multi-pass interferometer for high resolution angular measurement

Wei Li, Sitian Gao, Yushu Shi, Qi Li, Shi Li, Lu Huang

Proceedings Volume 11343, 1134308 (2019) https://doi.org/10.1117/12.2542085

KEYWORDS: Interferometers, Mirrors, Polarization, Beam splitters, Homodyne detection, Prisms

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Proceedings Article | 7 March 2019 Paper

Automatic real-time compensation of wavelength of heterodyne interferometer

Wei Jin, Qi Li, Yushu Shi, Sitian Gao, Wei Li, Shi Li

Proceedings Volume 11053, 110533G (2019) https://doi.org/10.1117/12.2512162

KEYWORDS: Refractive index, Interferometers, Heterodyning, Humidity, Interferometry, Environmental sensing, Mirrors, Fabry–Perot interferometers, Beam splitters, Receivers

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Proceedings Article | 7 March 2019 Paper

Experimental study on non-linear calibration of two-dimensional nano-positioning stage

Zhou Qi, Qi Li, Yu-shu Shi, Shi Li, Lu Huang, Sitian Gao

Proceedings Volume 11053, 1105341 (2019) https://doi.org/10.1117/12.2512394

KEYWORDS: Calibration, Interferometers, Laser systems engineering, Data acquisition, Motion models, Metrology, Nonlinear control, Actuators

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Proceedings Article | 15 November 2017 Paper

Novel dual-probes atomic force microscope for line width measurements

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, Shi Li

Proceedings Volume 10605, 106054G (2017) https://doi.org/10.1117/12.2296489

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Proceedings Article | 19 October 2016 Paper

Characterization of Akiyama probe applied to dual-probes atomic force microscope

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, Shi Li, Zhendong Zhu

Proceedings Volume 10155, 101553R (2016) https://doi.org/10.1117/12.2247464

KEYWORDS: Atomic force microscope

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Proceedings Article | 19 October 2016 Paper

Measurement accuracy analysis for crystal plane spacing of nitride epitaxial layer by x-ray diffraction

Jianjun Cui, Sitian Gao

Proceedings Volume 10155, 101553P (2016) https://doi.org/10.1117/12.2247433

KEYWORDS: Crystals, Metrology, X-ray diffraction

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Proceedings Article | 5 November 2015 Paper

Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW

Rui-Jun Zhang, Si-Tian Gao, Wei Li, Ben-Yong Chen, Yu-Shu Shi, Qi Li

Proceedings Volume 9795, 979514 (2015) https://doi.org/10.1117/12.2214428

KEYWORDS: Control systems, Control systems design, Signal generators, Data acquisition, Interferometers, LabVIEW, Ceramics, Metrology, Interfaces, Human-machine interfaces

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Proceedings Article | 6 March 2015 Paper

Calibration of industrial CT using two forest-balls

Yushu Shi, Xu Song, Shi Li, Wei Li, Qi Li, Siwen Chen, Fei Shen, Xiaoping Song, Sitian Gao

Proceedings Volume 9446, 944637 (2015) https://doi.org/10.1117/12.2181284

KEYWORDS: Calibration, Optical spheres, Printed circuit board testing, Standards development, X-rays, Sensors, Metrology, X-ray computed tomography, X-ray sources, 3D metrology

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Proceedings Article | 13 November 2014 Paper

The assessment of industrial CT's probing error

Yushu Shi, Sitian Gao, Xu Song, Dongsheng Li, Wei Li, Qi Li, Shi Li, Siwen Chen

Proceedings Volume 9276, 92760T (2014) https://doi.org/10.1117/12.2071795

KEYWORDS: Standards development, Optical spheres, Calibration, Printed circuit board testing, Error analysis, Picosecond phenomena, X-rays, Metrology, Sensors, Reconstruction algorithms

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Proceedings Article | 18 September 2014 Paper

Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method

Qi Li, Shi Li, Yushu Shi, Wei Li, Sitian Gao

Proceedings Volume 9282, 92820P (2014) https://doi.org/10.1117/12.2068715

KEYWORDS: Interferometers, Error analysis, Homodyne detection, Polarization, Heterodyning, Interference (communication), Sensors, Calibration, Atomic force microscopy, Signal detection

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Proceedings Article | 21 August 2014 Paper

Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations

Tingting Luo, Yuhang Chen, Wenhao Huang, Sitian Gao

Proceedings Volume 9283, 928312 (2014) https://doi.org/10.1117/12.2072892

KEYWORDS: Scanning probe microscopy, Surface roughness, Metrology, Structural design, Optics manufacturing, Printed circuit board testing, Calibration, Process modeling, Waveguides, Light scattering

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Proceedings Article | 10 October 2013 Paper

Development and measurement of single layer thickness standard

Jianjun Cui, Sitian Gao, Hua Du, Xiaoping Zhu, Liping Yan

Proceedings Volume 8916, 891634 (2013) https://doi.org/10.1117/12.2035503

KEYWORDS: Standards development, Thin films, Metrology, X-rays, Reflectivity, Profilometers, Calibration, Silica, Scanning probe microscopy, Fourier transforms

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Proceedings Article | 10 October 2013 Paper

Critical dimensional linewidth calibration using UV microscope and laser interferometry

Qi Li, Si-tian Gao, Wei Li, Ming-zhen Lu, Ming-kai Zhang

Proceedings Volume 8916, 891635 (2013) https://doi.org/10.1117/12.2035850

KEYWORDS: Ultraviolet radiation, Calibration, Objectives, Microscopes, Metrology, Interferometers, Actuators, Ferroelectric materials, Wavelets, Lithography

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Proceedings Article | 10 October 2013 Paper

Dual AFM probes alignment based on vision guidance

Hua-kun Zhang, Si-tian Gao, Ming-zhen Lu, Long-long Wang

Proceedings Volume 8916, 891627 (2013) https://doi.org/10.1117/12.2035775

KEYWORDS: Atomic force microscopy, Edge detection, Charge-coupled devices, Control systems, Calibration, 3D metrology, Quartz, Detection and tracking algorithms, Atomic force microscope, Optical resolution

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Proceedings Article | 10 October 2013 Paper

Simulation and signal analysis of Akiyama probe applied to atomic force microscope

Longlong Wang, Mingzhen Lu, Tong Guo, Sitian Gao, Huakun Zhang

Proceedings Volume 8916, 89160W (2013) https://doi.org/10.1117/12.2035726

KEYWORDS: Finite element methods, Sensors, Atomic force microscope, Feedback signals, Capacitance, Atomic force microscopy, Signal analysis, Calibration, Electrodes, Amplifiers

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Proceedings Article | 29 May 2013 Paper

A large range metrological atomic force microscope and its uncertainty analysis

S. Gao, Q. Li, W. Li, M. Lu, Y. Shi

Proceedings Volume 8729, 872905 (2013) https://doi.org/10.1117/12.2017674

KEYWORDS: Calibration, Head, Metrology, Interferometers, Mirrors, Atomic force microscope, Atomic force microscopy, Error analysis, Sensors, Temperature metrology

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Proceedings Article | 29 May 2013 Paper

Performance improvement of a large range metrological AFM through parasitic interference feedback artifacts removing by using laser multimode modulation method

Qi Li, Sitian Gao, Wei Li, Mingzhen Lu, Yushu Shi

Proceedings Volume 8729, 872906 (2013) https://doi.org/10.1117/12.2015663

KEYWORDS: Modulation, Semiconductor lasers, Sensors, Ferroelectric materials, Atomic force microscopy, Mirrors, Metrology, Interferometers, Laser damage threshold, Head

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Proceedings Article | 31 January 2013 Paper

Error analysis of homodyne multi-pass interferometer with Jones matrix

Wei Li, Sitian Gao, Mingzhen Lu, Yushu Shi

Proceedings Volume 8759, 87590A (2013) https://doi.org/10.1117/12.2014900

KEYWORDS: Interferometers, Polarization, Wave plates, Error analysis, Homodyne detection, Mirrors, Signal detection, Beam splitters, Transmittance, Optical components

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Proceedings Article | 31 January 2013 Paper

Long range metrological atomic force microscope with versatile measuring head

Mingzhen Lu, Sitian Gao, Qi Li, Wei Li, Yushu Shi, Xingfu Tao

Proceedings Volume 8759, 87594Y (2013) https://doi.org/10.1117/12.2014870

KEYWORDS: Head, Atomic force microscopy, Metrology, Interferometers, Mirrors, Sensors, Atomic force microscope, Scanning probe microscopy, Homodyne detection, Motion measurement

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Proceedings Article | 31 January 2013 Paper

Segmental calibration for commercial AFM in vertical direction

Yushu Shi, Sitian Gao, Mingzhen Lu, Wei Li, Xuefang Xu

Proceedings Volume 8759, 87594E (2013) https://doi.org/10.1117/12.2014859

KEYWORDS: Atomic force microscopy, Calibration, Metrology, Sensors, Standards development, Sensor calibration, Scanners, Ceramics, 3D scanning, Laser scanners

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Showing 5 of 20 publications

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