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Stefan Enderling
at Edinburgh Univ
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 20 December 2006 Paper
Characterisation of a CMP nanoscale planarisation-based process for RF MEMS resonators
S. Enderling, H. Lin, J. T. Stevenson, A. Bunting, A. Walton
Proceedings Volume 6415, 64150G (2006) https://doi.org/10.1117/12.699116
KEYWORDS: Chemical mechanical planarization, Polishing, Resonators, Semiconducting wafers, Silicon, Photomasks, Transducers, Microelectromechanical systems, Electrodes, Reactive ion etching
Proceedings Article | 17 August 2004 Paper
An optical workstation for characterization and modification of MEMS
John Hedley, Jim Burdess, Alun Harris, Barry Gallacher, Calum McNeil, Peter Cumpson, Stefan Enderling
Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545596
KEYWORDS: Microelectromechanical systems, Laser ablation, Semiconducting wafers, Profilometers, Wafer-level optics, Objectives, Silicon, Calibration, Gyroscopes, Sensors
Proceedings Article | 14 November 2002 Paper
Trade-offs for wireless transcutaneous rf communication in biotelemetric applications
Proceedings Volume 4937, (2002) https://doi.org/10.1117/12.476427
KEYWORDS: Antennas, Polymers, Acoustics, Actuators, Transducers, Ferroelectric polymers, Wave propagation, Polymer thick film flex circuits, Polymeric actuators, RF communications
Proceedings Article | 16 March 2001 Paper
Directions for rf-controlled intelligent microvalve
Proceedings Volume 4236, (2001) https://doi.org/10.1117/12.418777
KEYWORDS: Acoustics, Wireless communications, Wave propagation, Actuators, Flow cytometry
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