Mr. Stefan Schueler Profile

Stefan Schueler

at GlobalFoundries Dresden Module One LLC & Co. KG

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Publications (2)

Proceedings Article | 26 May 2022 Paper

Virtual cross metrology: leveraging process sequence for improved process characterization

J. Andres Torres, Ivan Kissiov, Melody Tao, Graham Mueller, Stefan Schueler, Carsten Hartig, Richard Gardner, Srividya Jayaram

Proceedings Volume 12053, 120531B (2022) https://doi.org/10.1117/12.2614943

KEYWORDS: Process modeling, Process control, Metrology, Calibration, Semiconducting wafers, Neodymium, Error analysis, Control systems, Semiconductors, Machine learning

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Proceedings Article | 22 February 2021 Presentation + Paper

Virtual metrology: how to build the bridge between the different data sources

Stefan Schueler, Carsten Hartig, Andres Torres, Ivan Kissiov, Richard Gardner, Essam Mohamed, Srividya Jayaram

Proceedings Volume 11611, 116112D (2021) https://doi.org/10.1117/12.2588467

KEYWORDS: Metrology, Bridges, Manufacturing, Data modeling, Time metrology, Semiconducting wafers, Reticles, Internet, Design for manufacturability, Data integration

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