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Prof. Sudhir Chandra
at Indian Institute of Technology Delhi
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 20 December 2006 Paper
A new technique for preparing PSG film using RF magnetron sputtering
Proceedings Volume 6415, 64151H (2006) https://doi.org/10.1117/12.696500
KEYWORDS: Polysomnography, Phosphorus, Sputter deposition, Silicon, Semiconducting wafers, Etching, Silicon films, Diffusion, Diodes, Resistance
Proceedings Article | 31 March 2006 Paper
Design and development of microstrip patch antenna at Ka-band using MEMS technology
Proceedings Volume 6172, 61721F (2006) https://doi.org/10.1117/12.659030
KEYWORDS: Antennas, Dielectrics, Silicon, Sputter deposition, Ka band, Microelectromechanical systems, Etching, Microwave radiation, Semiconducting wafers, Silicon films
Proceedings Article | 16 April 1998 Paper
Optimization of stress in LPCVD polysilicon films for MEMS applications
Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305590
KEYWORDS: Low pressure chemical vapor deposition, Annealing, Microelectromechanical systems
Proceedings Article | 16 April 1998 Paper
Capacitance voltage characteristics of the electrochemical cell for bulk silicon micromachining
Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305555
KEYWORDS: Capacitance, Silicon, Etching, Oxides, Electrodes, Electrochemical etching, Interfaces, Capacitors, Molybdenum, Anisotropic etching
Proceedings Article | 2 September 1997 Paper
Design and development of microstructures for MEMS applications
Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284571
KEYWORDS: Microelectromechanical systems, Annealing, Silicon, Wafer bonding, Micromachining, Boron, Dielectrics, Low pressure chemical vapor deposition, Surface micromachining
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