Dr. Svyatoslav Smolev
Process Engineer
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2006 Paper
Svjatoslav Smolev, A. Biswas, A. Frauenglass, Steven Brueck
Proceedings Volume 6154, 61542K (2006) https://doi.org/10.1117/12.656584
KEYWORDS: Photomasks, Imaging systems, Lithography, Photoresist materials, Resolution enhancement technologies, Optical proximity correction, Image filtering, Image quality, Interferometry, Neodymium

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