Mr. TaeHoi Park Profile

TaeHoi Park

at SEC

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Publications (1)

Proceedings Article | 12 November 2024 Presentation + Paper

Holistic patterning technology for DRAM 29nm pitch contact hole and pillar patterning

Seunghak Park, Van Tuong Pham, Sangho Yun, Woojin Jung, Hyo Seon Suh, Lander Verstraete, Hyung Jong Bae, Taehoi Park, Victor Blanco Carballo, Seonggil Heo, Kurt Ronse, Chan Hwang

Proceedings Volume 13215, 132150N (2024) https://doi.org/10.1117/12.3034701

KEYWORDS: Optical lithography, Extreme ultraviolet, Directed self assembly, Sustainability, Stochastic processes, Phase shifts, Materials processing, Lithography, Extreme ultraviolet lithography, Design

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