Mr. Taekmin Kwon Profile

Taekmin Kwon

at KAIST

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Publications (2)

Proceedings Article | 11 August 2008 Paper

Surface metrology of silicon wafers using a femtosecond pulse laser

Taekmin Kwon, Ki-Nam Joo, Seung-Woo Kim

Proceedings Volume 7063, 706310 (2008) https://doi.org/10.1117/12.797040

KEYWORDS: Semiconducting wafers, Silicon, Femtosecond phenomena, Interferometry, Polishing, Mirrors, Semiconductor lasers, Pulsed laser operation, Inspection, Transmittance

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Proceedings Article | 14 August 2006 Paper

A point-diffraction interferometer with vibration-desensitizing capability

Hagyong Kihm, Jungjae Park, Taekmin Kwon, Joon Ho You, Seung-Woo Kim

Proceedings Volume 6293, 62930B (2006) https://doi.org/10.1117/12.678691

KEYWORDS: Interferometers, Optical fibers, Phase shifts, Beam splitters, Wave plates, Spherical lenses, Semiconducting wafers, Polarization, Waveguides, Wavefronts

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