Mr. Takanobu Okamoto Profile

Takanobu Okamoto

at Nikon Corp

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Absolute coordinate system adjustment and calibration by using standalone alignment metrology system

Satoshi Ando, Haruki Saito, Sayuri Tanaka, Tetsuya Kawata, Takanobu Okamoto, Katsushi Makino, Yuji Shiba, Takehisa Yahiro, Jun Ishikawa, Masahiro Morita

Proceedings Volume 11611, 116112S (2021) https://doi.org/10.1117/12.2583695

KEYWORDS: Optical alignment, Metrology, Lithography, Calibration, Distortion, Semiconducting wafers, Overlay metrology, Scanners

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Proceedings Article | 24 March 2017 Paper

On-product overlay improvement with an enhanced alignment system

Tomonori Dosho, Yuji Shiba, Takanobu Okamoto, Hajime Yamamoto, Yujiro Hikida, Jay Brown, Go Ichinose, Masahiro Morita, Yuichi Shibazaki

Proceedings Volume 10147, 1014716 (2017) https://doi.org/10.1117/12.2257659

KEYWORDS: Semiconducting wafers, Optical alignment, Lithography, Manufacturing, Chemical mechanical planarization, Precision measurement, Overlay metrology, Distortion, Optical parametric oscillators, Systems modeling, 3D modeling

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