Mr. Takehiko Tomonaga Profile

Takehiko Tomonaga

Chief Corporate Planning Manager at Gigaphoton Inc.

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation

Study of further image performance improvement by spectral bandwidth for ArFi lithography lightsource

Takamitsu Komaki, Shinichi Matsumoto, Koichi Fujii, Takehiko Tomonaga, Taku Yamazaki, Toshihiro Oga

Proceedings Volume 11611, 116112T (2021) https://doi.org/10.1117/12.2583731

KEYWORDS: Lithography, Deep ultraviolet, Semiconductors, Optical proximity correction, Error analysis, Thermography, Overlay metrology, Optical engineering, Extreme ultraviolet

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source

Takehiko Tomonaga, Tukasa Hori, Daisuke Tei, Taku Yamazaki, Tommy Oga

Proceedings Volume 11613, 116130S (2021) https://doi.org/10.1117/12.2583755

KEYWORDS: Light sources, Light, Semiconductors, Semiconducting wafers, Optical alignment, New and emerging technologies

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