Prof. Takeshi Higashiguchi Profile

Prof. Takeshi Higashiguchi

Professor at Utsunomiya Univ

SPIE Involvement:

Author

Publications (36)

Proceedings Article | 13 November 2024 Poster

Poster

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Tomita, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Takashi Toshima, Hiroki Kondo, Takuji Sakamoto, Tanemasa Asano, Masaharu Shiratani, Atsushi Sunahara

Proceedings Volume PC13215, PC132150T (2024) https://doi.org/10.1117/12.3034536

KEYWORDS: Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Carbon dioxide lasers, Semiconductor manufacturing, Light sources, Tin, High volume manufacturing, Semiconductors, Lithography

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Proceedings Article | 26 August 2024 Paper

Paper

A short wavelength light source for lithography using a regenerative liquid metal bismuth target

Tatsuya Soramoto, Ayaka Ogiwara, Tsukasa Sugiura, Hiroki Morita, Takeshi Higashiguchi

Proceedings Volume 13177, 1317714 (2024) https://doi.org/10.1117/12.3032351

KEYWORDS: Bismuth, Liquids, Lithography, Photons, Ions, Light sources, Plasma, Solids, Pulsed laser operation, Beam diameter

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Proceedings Article | 26 August 2024 Paper

Paper

Spatial separation of EUV emission and energetic ions by use of double-laser-pulse irradiation

Tsukasa Sugiura, Hayato Yazawa, Takeru Niinuma, Masaki Kume, Hiroki Morita, Takeshi Higashiguchi

Proceedings Volume 13177, 1317715 (2024) https://doi.org/10.1117/12.3032289

KEYWORDS: Ions, Extreme ultraviolet, Ion irradiation, Tin, Laser irradiation, Plasma, Mirrors, Pulsed laser operation, Solids, X-rays

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Proceedings Article | 10 April 2024 Presentation

Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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Proceedings Article | 29 September 2023 Paper

Paper

Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source

Takeru Niinuma, Tsukasa Sugiura, Masaki Kume, Yuto Nakayama, Hiroki Morita, Atsushi Sunahara, Shinichi Namba, Takeshi Higashiguchi

Proceedings Volume 12915, 129150L (2023) https://doi.org/10.1117/12.2687366

KEYWORDS: Ions, Pulsed laser operation, Gadolinium, Plasma, Picosecond phenomena, Extreme ultraviolet, Light sources, Mirrors, Laser irradiation, Microchannel plates

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Proceedings Article | 23 August 2021 Paper

Paper

Birefringence mapping of optical material by use of supercontinuum vector beams

Juri Ogawa, Misaki Shoji, Ryo Kageyama, Toshitaka Wakayama, Takeshi Higashiguchi

Proceedings Volume 11908, 119080Q (2021) https://doi.org/10.1117/12.2601123

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Proceedings Article | 23 August 2021 Paper

Paper

Spectra of high energy ions as debris in laser-produced plasma EUV source

Yuto Nakayama, Hiromu Kawasaki, Takeshi Higashiguchi

Proceedings Volume 11908, 119080P (2021) https://doi.org/10.1117/12.2601122

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Proceedings Article | 4 March 2019 Paper

Paper

Development of soft x-ray laser irradiation beamline for ablation and damage study

Masahiko Ishino, Thanh-Hung Dinh, Noboru Hasegawa, Kazuyuki Sakaue, Takeshi Higashiguchi, Satoshi Ichimaru, Masatoshi Hatayama, Masakazu Washio, Masaharu Nishikino

Proceedings Volume 10905, 109051C (2019) https://doi.org/10.1117/12.2513390

KEYWORDS: Laser ablation, Mirrors, Beam splitters, Zirconium, X-rays, Optical filters, CCD cameras, X-ray lasers, Spherical lenses, Polarization

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Proceedings Article | 11 May 2017 Presentation + Paper

Presentation + Paper

Investigation and modelling of pump saturation effect on thermal load of Yb:YAG thin disk pumped at various wavelengths

P. Severová, M. Chyla, J. Mužík, M. Smrž, T. Miura, M. Kawasaki, T. Higashiguchi, A. Endo, T. Mocek

Proceedings Volume 10238, 102380P (2017) https://doi.org/10.1117/12.2265822

KEYWORDS: Luminescence, Head, Optical simulations, Solids, Quantum efficiency, Stars, Absorption, Thermal effects, Diodes, Temperature metrology

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Proceedings Article | 9 July 2015 Paper

Paper

Experimental observation of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Goki Arai, Hiroyuki Hara, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581A (2015) https://doi.org/10.1117/12.2192188

KEYWORDS: Extreme ultraviolet, Laser energy, Plasma, Tin, Pulsed laser operation, Picosecond phenomena, Metrology, Photomasks, Inspection, Nd:YAG lasers

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Proceedings Article | 9 July 2015 Paper

Paper

Evaluation of a dot target based high-brightness microplasma extreme ultraviolet (EUV) source by hydrodynamic simulation

Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581B (2015) https://doi.org/10.1117/12.2192194

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Ions, Picosecond phenomena, Tellurium, Opacity, Optical simulations, Numerical simulations

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Proceedings Article | 11 December 2012 Paper

Paper

Investigating the effects of laser intensity and pulse duration on 6.7-nm BEUV emission from Gadolinium plasma

Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, Takeshi Higashiguchi

Proceedings Volume 8678, 86780C (2012) https://doi.org/10.1117/12.2015164

KEYWORDS: Plasma, Picosecond phenomena, Ions, Pulsed laser operation, Gadolinium, Extreme ultraviolet, Nd:YAG lasers, Reflectivity, Time metrology, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2012 Paper

Paper

Laser-produced plasma UTA emission in 3-7nm spectral region

Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 83222J (2012) https://doi.org/10.1117/12.916308

KEYWORDS: Plasma, Bismuth, Ions, Extreme ultraviolet, Pulsed laser operation, Picosecond phenomena, Microscopes, Mirrors, X-rays, Tin

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Proceedings Article | 23 March 2012 Paper

Paper

A 6.7-nm beyond EUV source as a future lithography source

Takamitsu Otsuka, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 832214 (2012) https://doi.org/10.1117/12.916351

KEYWORDS: Extreme ultraviolet, Plasmas, Gadolinium, Pulsed laser operation, Ions, Nd:YAG lasers, Lithography, Tin, EUV optics, Carbon dioxide lasers

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Proceedings Article | 5 October 2011 Paper

Paper

Dynamics of the ultrashort laser pulse in a capillary discharge-preformed argon plasma channel

Shohei Sakai, Jun Miyazawa, Takeshi Higashiguchi, Noboru Yugami, Nadezhda Bobrova, Pavel Sasorov

Proceedings Volume 8140, 814012 (2011) https://doi.org/10.1117/12.892512

KEYWORDS: Plasma, Capillaries, Pulsed laser operation, Argon, Ions, Ionization, Argon ion lasers, Ultrafast phenomena, Waveguides, Photonic integrated circuits

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Proceedings Article | 28 September 2011 Paper

Paper

Characterization of broadband emission around 40 nm from potassium plasma

Hiromitsu Terauchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Rebekah D'Arcy, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8139, 81390U (2011) https://doi.org/10.1117/12.892899

KEYWORDS: Plasma, Potassium, Extreme ultraviolet, Ions, Spectroscopy, Pulsed laser operation, Capillaries, Contamination, Light sources, Beam controllers

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Proceedings Article | 28 September 2011 Paper

Paper

Shorter wavelength EUV source around 6.X nm by rare-earth plasma

Takamitsu Otsuka, Deirdre Kilbane, Thomas Cummins, Colm O'Gorman, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, Akira Endo, Takeshi Higashiguchi, Noboru Yugami

Proceedings Volume 8139, 81390T (2011) https://doi.org/10.1117/12.892897

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Terbium, Pulsed laser operation, Nd:YAG lasers, Solids, Mirrors, Carbon dioxide lasers

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Proceedings Article | 14 September 2011 Paper

Paper

Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Bowen Li, Akira Endo, Takamitsu Otsuka, Colm O'Gorman, Thomas Cummins, Tony Donnelly, Deirdre Kilbane, Weihua Jiang, Takeshi Higashiguchi, Noboru Yugami, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 8139, 81390P (2011) https://doi.org/10.1117/12.892513

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Carbon dioxide lasers, Pulsed laser operation, Tin, Lithography, Mirrors, Solids

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Proceedings Article | 8 September 2011 Paper

Paper

Tunable terahertz radiation from an ultrashort-laser-pulse-induced discharge in biased air

Fuminori Suzuki, Hiroaki Anno-Kashiwazaki, Jun Miyazawa, Shohei Ono, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, Ryosuke Kodama, Patric Muggli

Proceedings Volume 8119, 81190M (2011) https://doi.org/10.1117/12.892902

KEYWORDS: Terahertz radiation, Plasma, Pulsed laser operation, Ionization, Ultrafast phenomena, Laser energy, Electrodes, Antennas, Pulsed laser deposition, Nonlinear optics

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Proceedings Article | 8 September 2011 Paper

Paper

THz wave up-frequency turning by rapidly plasma creation

Akinori Nishida, Masahiro Nakata, Takafumi Oba, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, Ryosuke Kodama

Proceedings Volume 8119, 81190L (2011) https://doi.org/10.1117/12.892900

KEYWORDS: Plasma, Terahertz radiation, Crystals, Ionization, Laser crystals, Pulsed laser operation, Wave propagation, Electromagnetic radiation, Signal detection, Radio propagation

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Proceedings Article | 25 August 2010 Paper

Paper

Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 7802, 78020T (2010) https://doi.org/10.1117/12.858603

KEYWORDS: Potassium, Extreme ultraviolet, Plasma, Ions, Electrons, Capillaries, Electrodes, Light sources, Spectroscopy, CCD cameras

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Proceedings Article | 7 May 2009 Paper

Paper

Possibility of high power THz radiation via electromagnetically induced transparency at ion acoustic frequency region in laser-produced dense plasmas

Noboru Yugami, Takeshi Higashiguchi, Ryousuke Kodama

Proceedings Volume 7359, 735911 (2009) https://doi.org/10.1117/12.819890

KEYWORDS: Plasmas, Ions, Electromagnetic radiation, Terahertz radiation, Acoustics, Radio propagation, Wave propagation, Transparency, Refractive index, High power lasers

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Proceedings Article | 7 May 2009 Paper

Paper

Plasma diagnostics of a capillary plasma using pulse power

Takeshi Higashiguchi, Hiromitsu Terauchi, Jin-xiang Bai, Takashi Kikuchi, Noboru Yugami, Toyohiko Yatagai

Proceedings Volume 7359, 735917 (2009) https://doi.org/10.1117/12.819887

KEYWORDS: Plasma, Capillaries, Pulsed laser operation, Waveguides, Hydrogen, Laser applications, CCD cameras, Interferometers, Temperature metrology, Photography

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Proceedings Article | 7 May 2009 Paper

Paper

Compression of an ultrashort laser pulse via self-modulation in argon gas

Takeshi Higashiguchi, Masashi Kudo, Noboru Yugami, Eiji Takahashi

Proceedings Volume 7359, 735918 (2009) https://doi.org/10.1117/12.819888

KEYWORDS: Pulsed laser operation, Argon, Laser energy, Protactinium, Ultrafast phenomena, Argon ion lasers, Laser optics, Scanning probe microscopy, Refractive index, Free space optics

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Proceedings Article | 26 September 2007 Paper

Paper

THz radiation from a DARC source via a laser-produced relativistic ionization front

Nobuo Ohata, Kenta Yaegashi, Kun Li, Takeshi Higashiguchi, Noboru Yugami

Proceedings Volume 6772, 67720V (2007) https://doi.org/10.1117/12.756796

KEYWORDS: Terahertz radiation, Crystals, Ionization, Plasma, Laser beam diagnostics, Capacitors, Laser crystals, Microwave radiation, Pulsed laser operation, Electrodes

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Proceedings Article | 26 April 2007 Paper

Paper

Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses

Takeshi Higashiguchi, Keita Kawasaki, Yusuke Senba, Sumihiro Suetake, Masahito Katto, Shoichi Kubodera

Proceedings Volume 6346, 63462R (2007) https://doi.org/10.1117/12.739115

KEYWORDS: Extreme ultraviolet, Plasma, Lithium, Pulsed laser operation, Ions, Coded apertures, Solids, Mirrors, Xenon, Tin

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Proceedings Article | 26 April 2007 Paper

Paper

Vacuum ultraviolet argon excimer laser initiated by optical-field-induced ionization electrons

Shoichi Kubodera, Yuta Taniguchi, Takeshi Higashiguchi, Masahito Katto

Proceedings Volume 6346, 63460R (2007) https://doi.org/10.1117/12.737381

KEYWORDS: Vacuum ultraviolet, Argon, Plasma, Mirrors, Excimer lasers, Argon ion lasers, Electrons, Femtosecond phenomena, Excimers, UV optics

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Proceedings Article | 26 April 2007 Paper

Paper

Low-debris efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microtarget containing tin nanoparticles

Takeshi Higashiguchi, Naoto Dojyo, Yusuke Senba, Sumihiro Suetake, Masahito Katto, Shoichi Kubodera

Proceedings Volume 6346, 63460S (2007) https://doi.org/10.1117/12.737382

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Mirrors, Liquids, Ions, Reflectivity, Nanoparticles, Silicon

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Proceedings Article | 26 April 2007 Paper

Paper

Pulsed laser deposition for polycrystalline hydroxyapatite coatings

Masahito Katto, Kenzo Ishibashi, Atsushi Yokotani, Takeshi Higashiguchi, Shoichi Kubodera, Kou Kurosawa, Takeyoshi Nakayama, Hirotaka Katayama, Masayuki Fujita, Nobuyuki Abe, Masahiro Tsukamoto

Proceedings Volume 6346, 63463E (2007) https://doi.org/10.1117/12.739347

KEYWORDS: Excimer lasers, Crystals, Ceramics, Titanium, Ions, Particles, Pulsed laser deposition, Laser ablation, Laser crystals, Scanning electron microscopy

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Proceedings Article | 21 March 2007 Paper

Paper

Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles

Takeshi Higashiguchi, Sumihiro Suetake, Yusuke Senba, Yusuke Sato, Akira Hosotani, Yukari Takahashi, Shoichi Kubodera

Proceedings Volume 6517, 65173D (2007) https://doi.org/10.1117/12.711983

KEYWORDS: Ions, Extreme ultraviolet, Tin, Pulsed laser operation, Plasma, Silicon, Liquids, Mirrors, Lithium, Laser energy

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Proceedings Article | 24 March 2006 Paper

Paper

Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses

Takeshi Higashiguchi, Naoto Dojyo, Masaya Hamada, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera

Proceedings Volume 6151, 615145 (2006) https://doi.org/10.1117/12.659162

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, Tin, Ions, Mirrors, Liquids, Reflectivity, Silicon, Laser energy

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Proceedings Article | 23 March 2005 Paper

Paper

Vacuum ultraviolet argon excimer laser initiated by high-intensity laser-produced electrons

Shoichi Kubodera, Yusuke Morita, Takeshi Higashiguchi, Chirag Rajyaguru, Wataru Sasaki

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611130

KEYWORDS: Argon, Excimer lasers, Vacuum ultraviolet, Mirrors, Plasma, Electrons, Excimers, Argon ion lasers, Fiber lasers, Ionization

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Proceedings Article | 23 March 2005 Paper

Paper

Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses

Takeshi Higashiguchi, Chirag Rajyaguru, Masato Koga, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera, Takashi Kikuchi, Noboru Yugami, Shigeo Kawata, Alexander Andreev

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611202

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Liquids, Picosecond phenomena, Electronics engineering, Extreme ultraviolet lithography, Mirrors, Laser energy, Oxygen

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Proceedings Article | 7 January 2004 Paper

Paper

Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets

Takeshi Higashiguchi, Takahiro Hirata, Masato Koga, Chirag Rajyaguru, Wataru Sasaki, Shoichi Kubodera

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.509448

KEYWORDS: Extreme ultraviolet, Cryogenics, Xenon, Plasma, Ions, Pulsed laser operation, Krypton, Energy efficiency, X-rays, Argon

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Proceedings Article | 10 November 2003 Paper

Paper

Oscillation characteristics of a discharge pumped VUV Kr excimer laser

Takahiro Shirai, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki, Junji Kawanaka, Tatsushi Igarashi

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515513

KEYWORDS: Electrodes, Vacuum ultraviolet, Krypton, Excimers, Excimer lasers, Beam shaping, Reflectors, Gas lasers, Pulsed laser operation, Feedback signals

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Proceedings Article | 10 November 2003 Paper

Paper

Vacuum ultraviolet Ar2* excimer excited by an ultrashort pulse high intensity laser

Masanori Kaku, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515511

KEYWORDS: Plasma, Argon, Electrons, Excimers, Electron beams, Excimer lasers, Vacuum ultraviolet, Pulsed laser operation, Laser optics, Fiber lasers

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Showing 5 of 36 publications

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