In this paper, we tried to fabricate a TiO2-doped SiO2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the
glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface
acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz.
Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity
difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The
velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41
(ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to
the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW
velocities and fictive temperatures by heat-treating a part of the homogenized specimen.
This paper describes a mirror-finish slicing technology, and a spherical mirror-finish surface grinding technology. The former technology uses a thin metal bond micro-grain blade to which an electrolytic dressing is applied, for use with optical waveguide device endfaces. The latter technology uses a concave surface of metal bond micro-grain grinding wheel with electrolytic dressing, which produces convex spherical ferrule endfaces for Physical Control optical fiber connectors. They successfully produce mirror-finish endfaces of 0.06 micrometers Rmax directly, without the need for lapping. Endfaces produced with these technologies have sufficiently high optical light transmission characteristics.
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