Prof. Thomas Sure Profile

Prof. Thomas Sure

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Author

Publications (13)

Proceedings Article | 15 August 2023 Poster + Paper

Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry

Sandra Krämer, Kathrin Kroth, Thomas Sure, Peter Klar

Proceedings Volume 12618, 126182N (2023) https://doi.org/10.1117/12.2673843

KEYWORDS: Nanostructures, Nanolithography, Particles, Gold nanoparticles, Gold, Scatterometry

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Proceedings Article | 17 September 2018 Presentation + Paper

Optic design and manufacturing issues of a high numerical broadband IR solid immersion microscope objective

Thomas Sure, Prasad Sabbineni, Euan Ramsay

Proceedings Volume 10745, 107450J (2018) https://doi.org/10.1117/12.2321312

KEYWORDS: Glasses, Objectives, Tolerancing, Silicon, Solids, Refractive index, Optics manufacturing, Manufacturing, Transistors, Charged particle optics

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Proceedings Article | 26 June 2017 Paper

Robust and efficient modulation transfer function measurement with CMOS color sensors

Raziyeh Farsani, Thomas Sure, Uwe Apel

Proceedings Volume 10334, 1033404 (2017) https://doi.org/10.1117/12.2271975

KEYWORDS: Modulation transfer functions, Cameras, Imaging systems, Inspection, CMOS sensors, Sensors, Image sensors, Standards development, Manufacturing, Detection and tracking algorithms, Chromatic aberrations, Edge detection, Error analysis

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Proceedings Article | 7 September 2013 Paper

Ultra-high-precision alignment technology for lens manufacturing used for high-end optics

Sebastian Schiffner, Thomas Sure

Proceedings Volume 8838, 88380O (2013) https://doi.org/10.1117/12.2023634

KEYWORDS: Tolerancing, Optics manufacturing, Manufacturing, Light scattering, Optical alignment, Photodiodes, Telescopes, Collimation, Detection and tracking algorithms, Objectives

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Proceedings Article | 18 June 2007 Paper

Measurement errors of mirrorlike, tilted objects in white-light interferometry

Reinhard Berger, Thomas Sure, Wolfgang Osten

Proceedings Volume 6616, 66162E (2007) https://doi.org/10.1117/12.726142

KEYWORDS: Interferometers, Objectives, Chromatic aberrations, Mirrors, Interferometry, Phase measurement, Signal detection, Sensors, Light sources, Computer simulations

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Proceedings Article | 17 July 2006 Paper

Ultra-high-performance microscope objectives: the state of the art in design, manufacturing, and testing

Thomas Sure, Lambert Danner, Peter Euteneuer, Gerhard Hoppen, Armin Pausch, Wolfgang Vollrath

Proceedings Volume 6342, 63420E (2006) https://doi.org/10.1117/12.692202

KEYWORDS: Objectives, Microscopes, Confocal microscopy, Deep ultraviolet, Luminescence, Point spread functions, Wavefronts, Refractive index, Manufacturing, Microscopy

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Proceedings Article | 20 October 2005 Paper

DUV-microscope objectives: technology driver that forces the production to switch from the micrometer scale to the nanometer scale

Thomas Sure, Tobias Bauer, Joachim Heil, Joachim Wesner

Proceedings Volume 5965, 59651H (2005) https://doi.org/10.1117/12.625009

KEYWORDS: Objectives, Monochromatic aberrations, Wavefronts, Tolerancing, Microscopes, Imaging systems, Interferometers, Deep ultraviolet, Manufacturing, Optics manufacturing

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Proceedings Article | 2 May 2005 Paper

Automatically high precision manufacturing technology for micro-optic subgroups

Thomas Sure, Volker Guyenot, Michael Gerhardt

Proceedings Volume 10315, 1031505 (2005) https://doi.org/10.1117/12.605828

KEYWORDS: Manufacturing, Objectives, Micro optics, Microscopes, Image quality, Deep ultraviolet, Precision measurement

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Proceedings Article | 22 October 2004 Paper

Improved polarization ray tracing of thin-film optical coatings

Joachim Wesner, Frank Eisenkramer, Joachim Heil, Thomas Sure

Proceedings Volume 5524, (2004) https://doi.org/10.1117/12.559971

KEYWORDS: Thin films, Phase shifts, Polarization, Optical coatings, Ray tracing, Geometrical optics, Thin film coatings, Reflection, Optical design, Interfaces

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Proceedings Article | 26 February 2004 Paper

New tools for high-precision positioning of optical elements in high-NA microscope objectives

Joachim Heil, Tobias Bauer, Willi Mueller, Thomas Sure, Joachim Wesner

Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.512835

KEYWORDS: Objectives, Monochromatic aberrations, Point spread functions, Deep ultraviolet, Optical components, Microscopes, Metrology, Interferometry, Spherical lenses, Interferometers

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Proceedings Article | 22 December 2003 Paper

Microscope objective production: on the way from the micrometer scale to the nanometer scale

Thomas Sure, Joachim Heil, Joachim Wesner

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.505803

KEYWORDS: Objectives, Wavefronts, Microscopes, Monochromatic aberrations, Interferometers, Point spread functions, Tolerancing, Deep ultraviolet, Stars, Lens design

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Proceedings Article | 16 October 2002 Paper

Reconstructing the pupil function of microscope objectives from the intensity PSF

Joachim Wesner, Joachim Heil, Thomas Sure

Proceedings Volume 4767, (2002) https://doi.org/10.1117/12.451320

KEYWORDS: Point spread functions, Objectives, Wavefronts, Reconstruction algorithms, Microscopes, Signal to noise ratio, Error analysis, Monochromatic aberrations, Fourier transforms, Interferometry

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Proceedings Article | 5 December 2001 Paper

Requirements for the design and production of high numerical aperture objectives for 4-Pi confocal microscopy

Thomas Sure, Joachim Wesner, Joachim Heil

Proceedings Volume 4441, (2001) https://doi.org/10.1117/12.449568

KEYWORDS: Objectives, Confocal microscopy, Microscopes, Wavefronts, Diffraction, Luminescence, Chromatic aberrations, Point spread functions, Colorimetry, Product engineering

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Showing 5 of 13 publications

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