This paper presents the combination of "bottom-up" layer-by-layer (LbL) nano self-assembly and "top-down" micromanufacturing techniques for MEMS and microelectronics applications. Two approaches, modified lift-off and metal mask, were utilized to pattern nano-assembled thin films effectively. With nano self-assembly and surface micromachining, highly flexible nanoparticle-based magnetic cantilever platform for micro sensing and actuation was self-assembled. Self-assembled magnetic thin films on polymeric tunneling sensors were functional as a polymer actuators for the actuation of highly sensitive sensors. For microelectronics devices, self-assembled silica nanoparticle thin film acted as the dielectric layer for field-effect transistors. Nanoparticle- and polymer-based field-effect transistors with embedded nano self-assembled films as dielectric and active layers were fabricated and characterized successfully as well.
A layer-by-layer nanoassembly (LbL) allows production of ultrathin films with a precision of 1-2 nm and needed composition across the multilayer. It was used in combination with traditional lithography to develop micropatterns in ordered nanoparticle multilayers. A selective nanoparticle film growth was also demonstrated for microchannel silicon chips. Microfluidic properties of nanoorganized polymer microcapsules were studied with the microchannel device. Nanoorganized microcapsules production: A LbL-assembly of 20-nm thick
poly(styrenesulfonate) / poly(allylamine) shell on microtemplates and loading such hollow polyion shells with enzymes allowed fabrication of catalytic "bioreactors," as it was demonstrated for glucose oxidase, hemoglobin, and myoglobin ensembles.
Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.
An experimental system has been designed and constructed to conduct gas- solid heterogeneous catalytic reactions in microreactors. This apparatus is inteded to be used for any exothermic or endothermic reaction, including those with multiple feeds. It can be used to test the effectiveness of a microreactor design for a particular catalyst or to test the behavior of the catalyst itself. The system uses a test block that is plumbed for multiple feeds and vacuum to hold down a standard size microreactor chip. This chip has two exit vias, which includes one for the reactor effluent and one for the exit stream from a possible reactor membrane wall. The reactors are systems of channels with a smallest cross-dimension as small as 5 micrometers. The experimental system is equipped with temperature control and automatic data acquisition. The reactors can be stacked in order to scale up to higher throughput. A simulator has been developed that accounts for the unique physical aspects of reaction and flow in very small channels. Along with design, it assist in determining operating conditions and interpreting experimental results.
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