Dr. Tianguo Deng Profile

Dr. Tianguo Deng

at KLA Corp

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Publications (1)

Proceedings Article | 10 December 2024 Paper

Evaluation of lithography printability review in mature node photomask manufacturing

Dejian Li, Ziye Zhang, Tao Jiao, Pan Xiao, Wei Dong, Jie Wang, Tianguo Deng, Zhoujian Xiao, Yanghui Liu, Dongmei Wu, Zeyu Lei, Vikram Tolani

Proceedings Volume 13423, 1342318 (2024) https://doi.org/10.1117/12.3053069

KEYWORDS: Photomasks, Manufacturing, Inspection, Printing, Lithography, Semiconducting wafers, Image restoration, Image processing, Opacity, Light sources and illumination

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