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Dr. Tingting Luo
at Univ of Science and Technology of China
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Publications (1)
Proceedings Article | 21 August 2014 Paper
Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations
Tingting Luo, Yuhang Chen, Wenhao Huang, Sitian Gao
Proceedings Volume 9283, 928312 (2014) https://doi.org/10.1117/12.2072892
KEYWORDS: Scanning probe microscopy, Surface roughness, Metrology, Structural design, Optics manufacturing, Printed circuit board testing, Calibration, Process modeling, Waveguides, Light scattering
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