Dr. Toru Miura Profile

Dr. Toru Miura

at Enutei Tei Kisogijutsusogokenkyusho;NTT Device Technology Labs

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Publications (1)

Proceedings Article | 21 June 2019 Paper

Wafer-level inspection platform on high-volume photonic integrated circuits for drastic reduction of testing time

Toru Miura, Yoshiho Maeda, Shinji Matsuo, Hiroshi Fukuda

Proceedings Volume 11056, 110562R (2019) https://doi.org/10.1117/12.2527382

KEYWORDS: Semiconducting wafers, Wafer-level optics, Inspection, Wafer inspection, Waveguides, Optical alignment, Photonic integrated circuits, Wave propagation, Integrated optics, Manufacturing

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