Mr. Toshio Shibutani Profile

Toshio Shibutani

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 8 October 2024 Presentation + Paper

Measurement of aspherical and free-form mirror using ultrahigh accurate 3-D profilometer (UA3P)

Koji Handa, Tatsuya Sakuma, Akihiko Sugino, Kazumi Kobayashi, Toshio Shibutani

Proceedings Volume 13150, 1315008 (2024) https://doi.org/10.1117/12.3029891

KEYWORDS: Mirrors, Calibration, Mirror surfaces, Interferometers, Optical surfaces, Optical components, Profilometers

Read Abstract +

CMMs (Coordinate Measuring Machines) can measure the geometric tolerances of various mechanical components, but even the most accurate CMM have submicron accuracy, which makes it difficult to use them for evaluating optical components. On the other hand, more accurate μ-CMMs that can measure small optical components have also been developed. Our μ-CMM (UA3P) has three high-precision plane mirrors to construct three-dimensional orthogonal XYZ coordinates and uses a frequency-stabilized HeNe laser as the length scale. By scanning the surface of the object with a tactile-type probe, it is possible to measure the profile of optical components such as aspherical or free-form mirrors and lenses with an accuracy of less than 50nm. In this paper, by using a high accurate flat bar mirror whose profile has been measured by National Institute of Advanced Industrial Science and Technology (AIST) and making error table to correct the profile of the Z reference mirror installed in the machine, we could reduce the profile error of Z reference mirror within 24nm on the 400mm square in the XY plane. For tactile-type measurement machine, if the measurement range is large, the measurement time may be over an hour. Even in such the case of long-time measurements, we verified a method of configuring the profile of measured surfaces by referring to base axis data measured in a short period of time, and confirmed that profile waviness can be detected with 10nm precision by comparison with an interferometer. The advantage of a mechanical tactile measuring machine is that it can evaluate the profile without being influenced by the profile of the object. This means that our μ-CMM can perform highly accurate absolute profile measurement and evaluation for large-area free-form samples that are difficult to measure with an interferometer.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years