Dr. Ujwol Palanchoke Profile

Dr. Ujwol Palanchoke

at CEA-LETI

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 26 August 2024 Paper

Rethinking mask strategies for high vertical resolution grayscale lithography

Gaby Bélot, Aurélien Fay, Elodie Sungauer, Ujwol Palanchoke, Sébastien Bérard-Bergery, Cécile Gourgon

Proceedings Volume 13177, 131770D (2024) https://doi.org/10.1117/12.3032088

KEYWORDS: Design, 3D mask effects, Chromium, Data modeling, Photoresist materials, Tunable filters, Optical lithography, Electron beam lithography, Modulation, Grayscale lithography

Read Abstract +

Proceedings Article | 10 April 2024 Poster

Impact of process parameters on grayscale MEEF

Ujwol Palanchoke, Florian Tomaso, Yorrick Exbrayat, Gaby Bélot, Marie-Line Pourteau, Ivanie Mendes, Juline Saugnier, Aurélien Fay, Sébastien Bérard-Bergery, Elodie Sungauer, Charlotte Beylier, Rémi Coquand, Arthur Bernadac

Proceedings Volume PC12956, PC129560Y (2024) https://doi.org/10.1117/12.3010850

KEYWORDS: 3D mask effects, Grayscale lithography, 3D modeling, Data modeling, 3D microstructuring, 3D acquisition, Semiconductors, Profilometers, Process control, Photoresist processing

Read Abstract +

Proceedings Article | 1 May 2023 Presentation + Paper

Mask errors impact on grayscale lithography patterning

Ujwol Palanchoke, Gaby Bélot, Sébastien Bérard-Bergery, Juline Saugnier, Elodie Sungauer, Charlotte Beylier, Florian Tomaso, Marie-Line Pourteau, Ivanie Mendes, Rémi Coquand, Arthur Bernadac

Proceedings Volume 12497, 124970N (2023) https://doi.org/10.1117/12.2657600

KEYWORDS: Critical dimension metrology, 3D mask effects, Microlens, Design and modelling, Cadmium, Scanning electron microscopy, Semiconducting wafers, Error analysis, 3D acquisition, Grayscale lithography

Read Abstract +

Proceedings Article | 26 September 2016 Presentation + Paper

Molecular diodes in optical rectennas

David Duché, Ujwol Palanchoke, Luigi Terracciano, Florian-Xuan Dang, Lionel Patrone, Judikael Le Rouzo, Téodore Silviu Balaban, Claude Alfonso, Ahmed Charai, Olivier Margeat, Jorg Ackermann, Cécile Gourgon, Jean-Jacques Simon, Ludovic Escoubas

Proceedings Volume 9929, 99290T (2016) https://doi.org/10.1117/12.2237734

KEYWORDS: Diodes, Molecular self-assembly, Solar cells, Antennas, Ions, Nanoimprint lithography, Silicon, Silver, Visible radiation, Electrodes

Read Abstract +

Proceedings Article | 19 February 2014 Paper

CMOS-compatible metallic nanostructures for visible and infrared filtering

Ujwol Palanchoke, Salim Boutami, Jerome Hazart

Proceedings Volume 8994, 89940Y (2014) https://doi.org/10.1117/12.2037665

KEYWORDS: Optical filters, Visible radiation, Near infrared, Metals, Aluminum, Infrared radiation, Optical filtering, Polarization, Nanostructures, RGB color model

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years